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Naoshige FUSHIMI
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Nirasaki City, JP
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last 30 patents
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Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,527,404
Issue date
Dec 13, 2022
Tokyo Electron Limited
Tetsuya Saitou
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20230416920
Publication date
Dec 28, 2023
TOKYO ELECTRON LIMITED
Tatsuya YAMAGUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20200294799
Publication date
Sep 17, 2020
TOKYO ELECTRON LIMITED
Tetsuya SAITOU
H01 - BASIC ELECTRIC ELEMENTS