Naosuke NISHIMURA

Person

Kawachi-gun, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Imprint apparatus and method of manufacturing article
- Patent number 12,032,283
- Issue date Jul 9, 2024
- Canon Kabushiki Kaisha
- Naosuke Nishimura
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Lithography apparatus and method of manufacturing article
- Patent number 11,681,237
- Issue date Jun 20, 2023
- Canon Kabushiki Kaisha
- Naosuke Nishimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus and method of manufacturing article
- Patent number 11,462,404
- Issue date Oct 4, 2022
- Canon Kabushiki Kaisha
- Naosuke Nishimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithography apparatus and method of manufacturing article
- Patent number 11,137,696
- Issue date Oct 5, 2021
- Canon Kabushiki Kaisha
- Naosuke Nishimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Drawing apparatus, and method of manufacturing article
- Patent number 9,035,248
- Issue date May 19, 2015
- Canon Kabushiki Kaisha
- Naosuke Nishimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load-lock apparatus, device manufacturing apparatus, and device man...
- Patent number 7,751,029
- Issue date Jul 6, 2010
- Canon Kabushiki Kaisha
- Naosuke Nishimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage apparatus, exposure apparatus, and device manufacturing method
- Patent number 7,321,418
- Issue date Jan 22, 2008
- Canon Kabushiki Kaisha
- Yasuhito Sasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 7,307,692
- Issue date Dec 11, 2007
- Canon Kabushiki Kaisha
- Nobushige Korenaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate temperature adjustment apparatus for estimating a time ta...
- Patent number 6,552,308
- Issue date Apr 22, 2003
- Canon Kabushiki Kaisha
- Naosuke Nishimura
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
IMPRINT METHOD, IMPRINT APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20230097588
- Publication date Mar 30, 2023
- Canon Kabushiki Kaisha
- Naosuke Nishimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20210382405
- Publication date Dec 9, 2021
- Canon Kabushiki Kaisha
- Naosuke Nishimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20210354363
- Publication date Nov 18, 2021
- Canon Kabushiki Kaisha
- Naosuke Nishimura
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
LITHOGRAPHY APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20200379362
- Publication date Dec 3, 2020
- Canon Kabushiki Kaisha
- Naosuke Nishimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20190333757
- Publication date Oct 31, 2019
- Canon Kabushiki Kaisha
- Naosuke Nishimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20140346349
- Publication date Nov 27, 2014
- Canon Kabushiki Kaisha
- Naosuke NISHIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOAD-LOCK APPARATUS, DEVICE MANUFACTURING APPARATUS, AND DEVICE MAN...
- Publication number 20070115446
- Publication date May 24, 2007
- Canon Kabushiki Kaisha
- Naosuke NISHIMURA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage apparatus, exposure apparatus, and device manufacturing method
- Publication number 20060082754
- Publication date Apr 20, 2006
- Canon Kabushiki Kaisha
- Yasuhito Sasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and device manufacturing method
- Publication number 20050219486
- Publication date Oct 6, 2005
- Canon Kabushiki Kaisha
- Nobushige Korenaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Naosuke NISHIMURA

Person

Patents Grantslast 30 patents

Imprint apparatus and method of manufacturing article

Lithography apparatus and method of manufacturing article

Imprint apparatus and method of manufacturing article

Lithography apparatus and method of manufacturing article

Drawing apparatus, and method of manufacturing article

Load-lock apparatus, device manufacturing apparatus, and device man...

Stage apparatus, exposure apparatus, and device manufacturing method

Exposure apparatus and device manufacturing method

Substrate temperature adjustment apparatus for estimating a time ta...

Patents Applicationslast 30 patents

IMPRINT METHOD, IMPRINT APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

LITHOGRAPHY APPARATUS AND METHOD OF MANUFACTURING ARTICLE

IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE

LITHOGRAPHY APPARATUS AND METHOD OF MANUFACTURING ARTICLE

IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE

DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

LOAD-LOCK APPARATUS, DEVICE MANUFACTURING APPARATUS, AND DEVICE MAN...

Stage apparatus, exposure apparatus, and device manufacturing method

Exposure apparatus and device manufacturing method