Naotaka NORO

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Boise, ID, US

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Patents Grantslast 30 patents

Information Patent Grant
Method for forming RuSi film and substrate processing system
- Patent number 11,981,992
- Issue date May 14, 2024
- Tokyo Electron Limited
- Tadahiro Ishizaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Etching method
- Patent number 11,721,557
- Issue date Aug 8, 2023
- Tokyo Electron Limited
- Tadashi Mitsunari
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
FILM-FORMING METHOD, FILM-FORMING APPARATUS, AND OXIDATION METHOD
- Publication number 20220068637
- Publication date Mar 3, 2022
- Tokyo Electron Limited
- Kotaro MIYATANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCHING METHOD
- Publication number 20210351040
- Publication date Nov 11, 2021
- Tadashi MITSUNARI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20210301402
- Publication date Sep 30, 2021
- TOKYO ELECTRON LIMITED
- Yusuke SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING RuSi FILM AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20210017642
- Publication date Jan 21, 2021
- TOKYO ELECTRON LIMITED
- Tadahiro ISHIZAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Forming RuSi Film and Film and Film-Forming Apparatus
- Publication number 20200208260
- Publication date Jul 2, 2020
- TOKYO ELECTRON LIMITED
- Takamichi KIKUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...