Naoto KOGA

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam device and installation method
- Patent number 10,008,361
- Issue date Jun 26, 2018
- Hitachi High-Technologies Corporation
- Shuhei Yabu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM DEVICE AND INSTALLATION METHOD
- Publication number 20170169988
- Publication date Jun 15, 2017
- Shuhei YABU
- H01 - BASIC ELECTRIC ELEMENTS