Naoto Nakashima

Person

Yokohama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure method and apparatus
- Patent number 5,008,702
- Issue date Apr 16, 1991
- Hitachi, Ltd.
- Tsutomu Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for pattern detection
- Patent number 4,993,837
- Issue date Feb 19, 1991
- Hitachi, Ltd.
- Yoshitada Oshida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for optical alignment of semiconductor by usin...
- Patent number 4,862,008
- Issue date Aug 29, 1989
- Hitachi, Ltd.
- Yoshitada Oshida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination apparatus for exposure
- Patent number 4,819,033
- Issue date Apr 4, 1989
- Hitachi, Ltd.
- Yasuhiro Yoshitake
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reduction projection system alignment method and apparatus
- Patent number 4,779,986
- Issue date Oct 25, 1988
- Hitachi, Ltd.
- Naoto Nakashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment detection optical system of projection type aligner
- Patent number 4,744,666
- Issue date May 17, 1988
- Hitachi, Ltd.
- Yoshitada Oshida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor exposure apparatus and alignment method therefor
- Patent number 4,701,050
- Issue date Oct 20, 1987
- Hitachi, Ltd.
- Yoshitada Oshida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method of aligning exposure mask with workpiece
- Patent number 4,668,089
- Issue date May 26, 1987
- Hitachi, Ltd.
- Yoshitada Oshida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Naoto Nakashima

Person

Patents Grantslast 30 patents

Exposure method and apparatus

Method and apparatus for pattern detection

Method and apparatus for optical alignment of semiconductor by usin...

Illumination apparatus for exposure

Reduction projection system alignment method and apparatus

Alignment detection optical system of projection type aligner

Semiconductor exposure apparatus and alignment method therefor

Exposure apparatus and method of aligning exposure mask with workpiece