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Naoto Nakashima
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Yokohama, JP
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last 30 patents
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Patent Grant
Exposure method and apparatus
Patent number
5,008,702
Issue date
Apr 16, 1991
Hitachi, Ltd.
Tsutomu Tanaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for pattern detection
Patent number
4,993,837
Issue date
Feb 19, 1991
Hitachi, Ltd.
Yoshitada Oshida
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for optical alignment of semiconductor by usin...
Patent number
4,862,008
Issue date
Aug 29, 1989
Hitachi, Ltd.
Yoshitada Oshida
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Illumination apparatus for exposure
Patent number
4,819,033
Issue date
Apr 4, 1989
Hitachi, Ltd.
Yasuhiro Yoshitake
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Reduction projection system alignment method and apparatus
Patent number
4,779,986
Issue date
Oct 25, 1988
Hitachi, Ltd.
Naoto Nakashima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Alignment detection optical system of projection type aligner
Patent number
4,744,666
Issue date
May 17, 1988
Hitachi, Ltd.
Yoshitada Oshida
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Semiconductor exposure apparatus and alignment method therefor
Patent number
4,701,050
Issue date
Oct 20, 1987
Hitachi, Ltd.
Yoshitada Oshida
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus and method of aligning exposure mask with workpiece
Patent number
4,668,089
Issue date
May 26, 1987
Hitachi, Ltd.
Yoshitada Oshida
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY