Naoto Sagae

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Miyagi-gun, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and control method thereof
- Patent number 7,682,982
- Issue date Mar 23, 2010
- Tokyo Electron Limited
- Naoto Sagae
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS AND CONTROL METHOD THEREOF
- Publication number 20080179005
- Publication date Jul 31, 2008
- TOKYO ELECTRON LIMITED
- Naoto Sagae
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing apparatus and control method thereof
- Publication number 20050205208
- Publication date Sep 22, 2005
- TOKYO ELECTRON LIMITED
- Naoto Sagae
- H01 - BASIC ELECTRIC ELEMENTS