Naoto Sano

Person

Utsunomiya, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Laser oscillation apparatus, exposure apparatus, semiconductor devi...
- Patent number 7,145,925
- Issue date Dec 5, 2006
- Canon Kabushiki Kaisha
- Yoshiyuki Nagai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas laser device and exposure apparatus using the same
- Patent number 7,031,364
- Issue date Apr 18, 2006
- Canon Kabushiki Kaisha
- Naoto Sano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser oscillation apparatus, exposure apparatus, semiconductor devi...
- Patent number 6,870,865
- Issue date Mar 22, 2005
- Canon Kabushiki Kaisha
- Yoshiyuki Nagai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Projection exposure apparatus and device manufacturing method using...
- Patent number 6,795,167
- Issue date Sep 21, 2004
- Canon Kabushiki Kaisha
- Masakatsu Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus with a pulsed laser
- Patent number 6,727,976
- Issue date Apr 27, 2004
- Canon Kabushiki Kaisha
- Naoto Sano
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Projection exposure apparatus and device manufacturing method using...
- Patent number 6,646,717
- Issue date Nov 11, 2003
- Canon Kabushiki Kaisha
- Masakatsu Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus with a pulsed laser
- Patent number 6,348,357
- Issue date Feb 19, 2002
- Canon Kabushiki Kaishia
- Naoto Sano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method using the same
- Patent number 6,322,220
- Issue date Nov 27, 2001
- Canon Kabushiki Kaisha
- Naoto Sano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Excimer laser generator provided with a laser chamber with a fluori...
- Patent number 6,215,806
- Issue date Apr 10, 2001
- Canon Kabushiki Kaisha
- Tadahiro Ohmi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure apparatus with a pulsed laser
- Patent number 5,969,799
- Issue date Oct 19, 1999
- Canon Kabushiki Kaisha
- Naoto Sano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Light quantity measuring system and exposure apparatus using the same
- Patent number 5,949,468
- Issue date Sep 7, 1999
- Canon Kabushiki Kaisha
- Tsutomu Asahina
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Grant
Discharge electrode, shape-restoration thereof, excimer laser oscil...
- Patent number 5,923,693
- Issue date Jul 13, 1999
- Ohmi; Tadahiro
- Tadahiro Ohmi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 5,846,678
- Issue date Dec 8, 1998
- Canon Kabushiki Kaisha
- Hidetoshi Nishigori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method and apparatus and device produced thereby in which...
- Patent number 5,661,547
- Issue date Aug 26, 1997
- Canon Kabushiki Kaisha
- Masato Aketagawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method and apparatus
- Patent number 5,597,670
- Issue date Jan 28, 1997
- Canon Kabushiki Kaisha
- Masato Aketagawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scanning exposure apparatus and method including controlling irradi...
- Patent number 5,567,928
- Issue date Oct 22, 1996
- Canon Kabushiki Kaisha
- Naoto Sano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method and apparatus for controlling light pulse emission...
- Patent number 5,250,797
- Issue date Oct 5, 1993
- Canon Kabushiki Kaisha
- Naoto Sano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method and apparatus
- Patent number 5,121,160
- Issue date Jun 9, 1992
- Canon Kabushiki Kaisha
- Naoto Sano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Gas laser device and exposure apparatus using the same
- Publication number 20060093009
- Publication date May 4, 2006
- Canon Kabushiki Kaisha
- Naoto Sano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Laser oscillation apparatus, exposure apparatus, semiconductor devi...
- Publication number 20050030987
- Publication date Feb 10, 2005
- Canon Kabushiki Kaisha
- Yoshiyuki Nagai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS LASER DEVICE AND EXPOSURE APPARATUS USING THE SAME
- Publication number 20010046248
- Publication date Nov 29, 2001
- NAOTO SANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Laser oscillation apparatus, exposure apparatus, semiconductor devi...
- Publication number 20010036207
- Publication date Nov 1, 2001
- Yashiyuki Nagai
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Laser oscillation apparatus, exposure apparatus, semiconductor devi...

Gas laser device and exposure apparatus using the same

Laser oscillation apparatus, exposure apparatus, semiconductor devi...

Projection exposure apparatus and device manufacturing method using...

Exposure apparatus with a pulsed laser

Projection exposure apparatus and device manufacturing method using...

Exposure apparatus with a pulsed laser

Exposure apparatus and device manufacturing method using the same

Excimer laser generator provided with a laser chamber with a fluori...

Exposure apparatus with a pulsed laser

Light quantity measuring system and exposure apparatus using the same

Discharge electrode, shape-restoration thereof, excimer laser oscil...

Exposure apparatus and device manufacturing method

Exposure method and apparatus and device produced thereby in which...

Exposure method and apparatus

Scanning exposure apparatus and method including controlling irradi...

Exposure method and apparatus for controlling light pulse emission...

Exposure method and apparatus

Patents Applicationslast 30 patents

Gas laser device and exposure apparatus using the same

Laser oscillation apparatus, exposure apparatus, semiconductor devi...

GAS LASER DEVICE AND EXPOSURE APPARATUS USING THE SAME

Laser oscillation apparatus, exposure apparatus, semiconductor devi...