Naoto Tsuji

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing device having connection plates, substrate pro...
- Patent number 11,339,476
- Issue date May 24, 2022
- ASM IP Holding B.V.
- Naoto Tsuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for dispensing a vapor phase reactant to a reaction chamb...
- Patent number 10,844,484
- Issue date Nov 24, 2020
- ASM IP Holding B.V.
- Lucian Jdira
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate treatment apparatus
- Patent number 10,435,789
- Issue date Oct 8, 2019
- ASM IP Holding B.V.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor manufacturing apparatus
- Patent number 9,963,782
- Issue date May 8, 2018
- ASM IP Holding B.V.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Anti-slip end-effector for transporting workpiece
- Patent number 9,370,863
- Issue date Jun 21, 2016
- ASM IP Holding B.V.
- Naoto Tsuji
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Top plate
- Patent number D753269
- Issue date Apr 5, 2016
- ASM IP Holding B.V.
- Takayuki Yamagishi
- D23 - Environmental heating and cooling
Information Patent Grant
Seal ring
- Patent number D743513
- Issue date Nov 17, 2015
- ASM IP Holding B.V.
- Takayuki Yamagishi
- D23 - Environmental heating and cooling
Information Patent Grant
Shower plate
- Patent number D735836
- Issue date Aug 4, 2015
- ASM IP Holding B.V.
- Takayuki Yamagishi
- D23 - Environmental heating and cooling
Information Patent Grant
Shower plate
- Patent number D733843
- Issue date Jul 7, 2015
- ASM IP Holding, B.V.
- Takayuki Yamagishi
- D23 - Environmental heating and cooling
Information Patent Grant
Top plate
- Patent number D733261
- Issue date Jun 30, 2015
- ASM IP Holding B.V.
- Takayuki Yamagishi
- D23 - Environmental heating and cooling
Information Patent Grant
Top plate
- Patent number D732644
- Issue date Jun 23, 2015
- ASM IP Holding B.V.
- Takayuki Yamagishi
- D23 - Environmental heating and cooling
Information Patent Grant
Shower plate
- Patent number D732145
- Issue date Jun 16, 2015
- ASM IP Holding B.V.
- Takayuki Yamagishi
- D23 - Environmental heating and cooling
Information Patent Grant
Method for forming layer constituted by repeated stacked layers
- Patent number 9,018,093
- Issue date Apr 28, 2015
- ASM IP Holding B.V.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heater block
- Patent number D726884
- Issue date Apr 14, 2015
- ASM IP Holding B.V.
- Takayuki Yamagishi
- D23 - Environmental heating and cooling
Information Patent Grant
Heater block
- Patent number D725168
- Issue date Mar 24, 2015
- ASM IP Holding B.V.
- Takayuki Yamagishi
- D15 - Machines not elsewhere specified
Information Patent Grant
Shower plate
- Patent number D724701
- Issue date Mar 17, 2015
- ASM IP Holding, B.V.
- Takayuki Yamagishi
- D23 - Environmental heating and cooling
Information Patent Grant
Shower plate
- Patent number D720838
- Issue date Jan 6, 2015
- ASM IP Holding B.V.
- Takayuki Yamagishi
- D23 - Environmental heating and cooling
Information Patent Grant
Method for forming Si-containing film using two precursors by ALD
- Patent number 8,912,101
- Issue date Dec 16, 2014
- ASM IP Holding B.V.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming dielectric film using porogen gas
- Patent number 7,955,650
- Issue date Jun 7, 2011
- ASM Japan K.K.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming dielectric SiOCH film having chemical stability
- Patent number 7,807,566
- Issue date Oct 5, 2010
- ASM Japan K.K.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shower plate having projections and plasma CVD apparatus using same
- Patent number 7,799,134
- Issue date Sep 21, 2010
- ASM Japan K.K.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming silicon-containing insulation film having low die...
- Patent number 7,718,544
- Issue date May 18, 2010
- ASM Japan K.K.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for forming thin film using surface-treated sh...
- Patent number 7,641,761
- Issue date Jan 5, 2010
- ASM Japan K.K.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma CVD apparatus for forming uniform film
- Patent number 7,418,921
- Issue date Sep 2, 2008
- ASM Japan K.K.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming silicon-containing insulation film having low di...
- Patent number 7,147,900
- Issue date Dec 12, 2006
- ASM Japan K.K.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Interlayer insulation film used for multilayer interconnect of semi...
- Patent number 7,098,129
- Issue date Aug 29, 2006
- ASM Japan K.K.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming fluorine-doped low-dielectric-constant insulating...
- Patent number 7,037,855
- Issue date May 2, 2006
- ASM Japan K.K.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas-shield electron-beam gun for thin-film curing application
- Patent number 7,012,268
- Issue date Mar 14, 2006
- ASM Japan K.K.
- Nobuo Matsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming interlayer insulation film
- Patent number 6,905,978
- Issue date Jun 14, 2005
- ASM Japan K.K.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming silicon-containing insulation film having low die...
- Patent number 6,818,570
- Issue date Nov 16, 2004
- ASM Japan K.K.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TREATMENT APPARATUS
- Publication number 20230253232
- Publication date Aug 10, 2023
- ASM IP HOLDING B.V.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS WITH FLOW CONTROL RING, AND SUBSTRAT...
- Publication number 20220259731
- Publication date Aug 18, 2022
- ASM IP HOLDING B.V.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS DISTRIBUTION ASSEMBLY AND METHOD OF USING SAME
- Publication number 20210254216
- Publication date Aug 19, 2021
- ASM IP HOLDING B.V.
- Yukihiro Mori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING DEVICE HAVING CONNECTION PLATES, SUBSTRATE PRO...
- Publication number 20210102289
- Publication date Apr 8, 2021
- ASM IP HOLDING B.V.
- Naoto Tsuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS HAVING MANIFOLD
- Publication number 20200115797
- Publication date Apr 16, 2020
- ASM IP HOLDING B.V.
- Naoto TSUJI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR DISPENSING A VAPOR PHASE REACTANT TO A REACTION CHAMB...
- Publication number 20190093221
- Publication date Mar 28, 2019
- ASM IP HOLDING B.V.
- Lucian Jdira
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATMENT APPARATUS
- Publication number 20180158709
- Publication date Jun 7, 2018
- ASM IP HOLDING B.V.
- Naoto TSUJI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20160237559
- Publication date Aug 18, 2016
- ASM IP HOLDING B.V.
- Naoto TSUJI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20160153088
- Publication date Jun 2, 2016
- ASM IP HOLDING B.V.
- Naoto TSUJI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANTI-SLIP END-EFFECTOR FOR TRANSPORTING WORKPIECE
- Publication number 20150217456
- Publication date Aug 6, 2015
- ASM IP HOLDING B.V.
- Naoto Tsuji
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Method for Forming Layer Constituted by Repeated Stacked Layers
- Publication number 20140213065
- Publication date Jul 31, 2014
- ASM IP HOLDING B.V.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
UV Irradiation Apparatus with Cleaning Mechanism and Method for Cle...
- Publication number 20140116335
- Publication date May 1, 2014
- ASM IP HOLDING B.V.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
UV-Curing Apparatus Provided With Wavelength-Tuned Excimer Lamp and...
- Publication number 20140099798
- Publication date Apr 10, 2014
- ASM IP HOLDING B.V.
- Naoto Tsuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Forming Si-Containing Film Using Two Precursors by ALD
- Publication number 20130244446
- Publication date Sep 19, 2013
- ASM IP HOLDING B.V.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING FLUORINE-CONTAINING DIELECTRIC FILM
- Publication number 20100003833
- Publication date Jan 7, 2010
- ASM JAPAN K.K.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING DIELECTRIC SiOCH FILM HAVING CHEMICAL STABILITY
- Publication number 20090148964
- Publication date Jun 11, 2009
- ASM JAPAN K.K.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING DIELECTRIC FILM USING POROGEN GAS
- Publication number 20080305258
- Publication date Dec 11, 2008
- ASM JAPAN K.K.
- Naoto TSUJI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR INCREASING MECHANICAL STRENGTH OF DIELECTRIC FILM BY USI...
- Publication number 20080220619
- Publication date Sep 11, 2008
- ASM JAPAN K.K.
- Kiyohiro MATSUSHITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma CVD apparatus for forming uniform film
- Publication number 20070037390
- Publication date Feb 15, 2007
- ASM JAPAN K.K.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for depositing thin film by controlling effective distance b...
- Publication number 20070032048
- Publication date Feb 8, 2007
- ASM JAPAN K.K.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING SILICON-CONTAINING INSULATION FILM HAVING LOW DIE...
- Publication number 20060183341
- Publication date Aug 17, 2006
- ASM JAPAN K.K.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING FLUORINE-DOPED LOW-DIELECTRIC-CONSTANT INSULATING...
- Publication number 20060046519
- Publication date Mar 2, 2006
- ASM JAPAN K.K.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Shower plate having projections and plasma CVD apparatus using same
- Publication number 20050183666
- Publication date Aug 25, 2005
- ASM JAPAN K.K.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and method for forming thin film using surface-treated sh...
- Publication number 20050156063
- Publication date Jul 21, 2005
- ASM JAPAN K.K.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for forming silicon-containing insulation film...
- Publication number 20050034667
- Publication date Feb 17, 2005
- ASM JAPAN K.K.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gas-shield electron-beam gun for thin-film curing application
- Publication number 20040232355
- Publication date Nov 25, 2004
- ASM JAPAN K.K.
- Nobuo Matsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Interlayer insulation film used for multilayer interconnect of semi...
- Publication number 20040048490
- Publication date Mar 11, 2004
- ASM JAPAN K.K.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma CVD apparatus comprising susceptor with ring
- Publication number 20030192478
- Publication date Oct 16, 2003
- ASM JAPAN K.K.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of forming interlayer insulation film
- Publication number 20030181069
- Publication date Sep 25, 2003
- ASM JAPAN K.K.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of forming silicon-containing insulation film having low die...
- Publication number 20030176030
- Publication date Sep 18, 2003
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Naoto Tsuji

Person

Patents Grantslast 30 patents

Substrate processing device having connection plates, substrate pro...

Apparatus for dispensing a vapor phase reactant to a reaction chamb...

Substrate treatment apparatus

Semiconductor manufacturing apparatus

Anti-slip end-effector for transporting workpiece

Top plate

Seal ring

Shower plate

Shower plate

Top plate

Top plate

Shower plate

Method for forming layer constituted by repeated stacked layers

Heater block

Heater block

Shower plate

Shower plate

Method for forming Si-containing film using two precursors by ALD

Method for forming dielectric film using porogen gas

Method for forming dielectric SiOCH film having chemical stability

Shower plate having projections and plasma CVD apparatus using same

Method of forming silicon-containing insulation film having low die...

Apparatus and method for forming thin film using surface-treated sh...

Plasma CVD apparatus for forming uniform film

Method for forming silicon-containing insulation film having low di...

Interlayer insulation film used for multilayer interconnect of semi...

Method of forming fluorine-doped low-dielectric-constant insulating...

Gas-shield electron-beam gun for thin-film curing application

Method of forming interlayer insulation film

Method of forming silicon-containing insulation film having low die...

Patents Applicationslast 30 patents

SUBSTRATE TREATMENT APPARATUS

SUBSTRATE PROCESSING APPARATUS WITH FLOW CONTROL RING, AND SUBSTRAT...

GAS DISTRIBUTION ASSEMBLY AND METHOD OF USING SAME

SUBSTRATE PROCESSING DEVICE HAVING CONNECTION PLATES, SUBSTRATE PRO...

SUBSTRATE PROCESSING APPARATUS HAVING MANIFOLD

APPARATUS FOR DISPENSING A VAPOR PHASE REACTANT TO A REACTION CHAMB...

SUBSTRATE TREATMENT APPARATUS

SEMICONDUCTOR MANUFACTURING APPARATUS

FILM FORMING APPARATUS

ANTI-SLIP END-EFFECTOR FOR TRANSPORTING WORKPIECE

Method for Forming Layer Constituted by Repeated Stacked Layers

UV Irradiation Apparatus with Cleaning Mechanism and Method for Cle...

UV-Curing Apparatus Provided With Wavelength-Tuned Excimer Lamp and...

Method for Forming Si-Containing Film Using Two Precursors by ALD

METHOD OF FORMING FLUORINE-CONTAINING DIELECTRIC FILM

METHOD FOR FORMING DIELECTRIC SiOCH FILM HAVING CHEMICAL STABILITY

METHOD FOR FORMING DIELECTRIC FILM USING POROGEN GAS

METHOD FOR INCREASING MECHANICAL STRENGTH OF DIELECTRIC FILM BY USI...

Plasma CVD apparatus for forming uniform film

Method for depositing thin film by controlling effective distance b...

METHOD OF FORMING SILICON-CONTAINING INSULATION FILM HAVING LOW DIE...

METHOD OF FORMING FLUORINE-DOPED LOW-DIELECTRIC-CONSTANT INSULATING...

Shower plate having projections and plasma CVD apparatus using same

Apparatus and method for forming thin film using surface-treated sh...

Method and apparatus for forming silicon-containing insulation film...

Gas-shield electron-beam gun for thin-film curing application

Interlayer insulation film used for multilayer interconnect of semi...

Plasma CVD apparatus comprising susceptor with ring

Method of forming interlayer insulation film

Method of forming silicon-containing insulation film having low die...