Membership
Tour
Register
Log in
Naoto Tsuji
Follow
Person
Chiba-ken, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Method of cleaning CVD device and cleaning device therefor
Patent number
6,935,351
Issue date
Aug 30, 2005
Anelva Corporation
Koji Shibata
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
Plasma film-forming apparatus and cleaning method for the same
Publication number
20040007247
Publication date
Jan 15, 2004
ULVAC, Inc.
Shin Asari
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of cleaning cvd device and cleaning device therefor
Publication number
20030079757
Publication date
May 1, 2003
Koji Shibata
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Plasma film-forming apparatus and cleaning method for the same
Publication number
20020124866
Publication date
Sep 12, 2002
ULVAC, Inc.
Shin Asari
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...