Naoto Watanabe

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Nagano, JP

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Patents Grantslast 30 patents

Information Patent Grant
Tray and wafer holding apparatus
- Patent number 9,837,297
- Issue date Dec 5, 2017
- Shinko Electric Industries Co., Ltd.
- Koki Tamagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate for electrostatic chuck and electrostatic chuck
- Patent number 8,441,772
- Issue date May 14, 2013
- Shinko Electric Industries Co., Ltd.
- Tadayoshi Yoshikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck and method of manufacturing the same
- Patent number 8,023,246
- Issue date Sep 20, 2011
- Shinko Electric Industries Co., Ltd.
- Norio Shiraiwa
- B32 - LAYERED PRODUCTS
Information Patent Grant
Electrostatic chuck
- Patent number 7,483,256
- Issue date Jan 27, 2009
- Shinko Electric Industries Co., Ltd.
- Norio Shiraiwa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
TRAY AND WAFER HOLDING APPARATUS
- Publication number 20150371885
- Publication date Dec 24, 2015
- Shinko Electric Industries Co., Ltd.
- Koki TAMAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE FOR ELECTROSTATIC CHUCK AND ELECTROSTATIC CHUCK
- Publication number 20110096461
- Publication date Apr 28, 2011
- Shinko Electric Industries Co., Ltd.
- Tadayoshi YOSHIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK AND SUBSTRATE TEMPERATURE ADJUSTING-FIXING DEVICE
- Publication number 20090168292
- Publication date Jul 2, 2009
- Shinko Electric Industries Co., Ltd.
- Naoto Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK AND METHOD OF MANUFACTURING THE SAME
- Publication number 20080278883
- Publication date Nov 13, 2008
- Shinko Electric Industries Co., Ltd.
- Norio Shiraiwa
- B32 - LAYERED PRODUCTS
Information Patent Application
ELECTROSTATIC CHUCK
- Publication number 20080266747
- Publication date Oct 30, 2008
- Shinko Electric Industries Co., Ltd.
- Norio Shiraiwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK
- Publication number 20080080118
- Publication date Apr 3, 2008
- Shinko Electric Industries Co., Ltd.
- Norio Shiraiwa
- H01 - BASIC ELECTRIC ELEMENTS