Naoya Hirakawa

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Reduced-pressure drying unit and coating film forming method
- Patent number 7,534,467
- Issue date May 19, 2009
- Tokyo Electron Limited
- Takahiro Kitano
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing method and substrate processing system
- Patent number 7,179,504
- Issue date Feb 20, 2007
- Tokyo Electron Limited
- Takahiro Kitano
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing method and substrate processing system
- Patent number 6,824,616
- Issue date Nov 30, 2004
- Tokyo Electron Limited
- Takahiro Kitano
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Reduced-pressure drying unit and coating film forming method
- Patent number 6,808,566
- Issue date Oct 26, 2004
- Tokyo Electron Limited
- Takahiro Kitano
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing unit
- Patent number 6,773,510
- Issue date Aug 10, 2004
- Tokyo Electron Limited
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Substrate processing method and substrate processing system
- Publication number 20050100679
- Publication date May 12, 2005
- TOKYO ELECTRON LIMITED
- Takahiro Kitano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Reduced-pressure drying unit and coating film forming method
- Publication number 20050087129
- Publication date Apr 28, 2005
- TOKYO ELECTRON LIMITED
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Reduced-pressure drying unit and coating film forming method
- Publication number 20030054668
- Publication date Mar 20, 2003
- TOKYO ELECTRON LIMITED
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing unit
- Publication number 20020148566
- Publication date Oct 17, 2002
- TOKYO ELECTRON LIMITED
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing method and substrate processing system
- Publication number 20020150691
- Publication date Oct 17, 2002
- TOKYO ELECTRON LIMITED
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS