Naoya Matsuura

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Toyama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate support and substrate processing apparatus
- Patent number 11,211,280
- Issue date Dec 28, 2021
- Kokusai Electric Corporation
- Takayuki Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 9,842,754
- Issue date Dec 12, 2017
- Hitachi Kokusai Electric, Inc.
- Akira Takahashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Substrate Support and Substrate Processing Apparatus
- Publication number 20180374740
- Publication date Dec 27, 2018
- Kokusai Electric Corporation
- Takayuki SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Manufacturing Semiconductor Device
- Publication number 20160284581
- Publication date Sep 29, 2016
- Hitachi Kokusai Electric Inc.
- Takeshi Yasui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20150371883
- Publication date Dec 24, 2015
- Hitachi Kokusai Electric Inc.
- Akira TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus, Method of Processing Substrate, Met...
- Publication number 20130243550
- Publication date Sep 19, 2013
- Hitachi Kokusai Electric Inc.
- Takeshi Yasui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20120034570
- Publication date Feb 9, 2012
- Hitachi Kokusai Electric Inc.
- Takeshi YASUI
- H01 - BASIC ELECTRIC ELEMENTS