Naoya MIYASHITA

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Toyama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, method of measuring temperature of...
- Patent number 10,340,164
- Issue date Jul 2, 2019
- Hitachi Kokusai Electric, Inc.
- Akihito Watanabe
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Substrate Processing Apparatus, Method of Measuring Temperature of...
- Publication number 20150099235
- Publication date Apr 9, 2015
- Hitachi Kokusai Electric Inc.
- Akihito WATANABE
- G01 - MEASURING TESTING