NAOYUKI HANDA

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Tokyo, JP

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Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE CLEANING DEVICE, SUBSTRATE CLEANING METHOD, AND SUBSTRATE...
- Publication number 20240351078
- Publication date Oct 24, 2024
- EBARA CORPORATION
- Naoyuki HANDA
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING APPARATUS
- Publication number 20230234107
- Publication date Jul 27, 2023
- EBARA CORPORATION
- NAOYUKI HANDA
- B08 - CLEANING