Naoyuki OKAMOTO

Person

Tama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Ion beam processing apparatus, electrode assembly, and method of cl...
- Patent number 12,119,203
- Issue date Oct 15, 2024
- Canon Anelva Corporation
- Yasushi Yasumatsu
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,694,882
- Issue date Jul 4, 2023
- Canon Anelva Corporation
- Yuji Takanami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam processing apparatus, electrode assembly, and method of cl...
- Patent number 11,355,314
- Issue date Jun 7, 2022
- Canon Anelva Corporation
- Yasushi Yasumatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,270,873
- Issue date Mar 8, 2022
- Canon Anelva Corporation
- Yuji Takanami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion beam processing apparatus, electrode assembly, and method of cl...
- Patent number 10,879,040
- Issue date Dec 29, 2020
- Canon Anelva Corporation
- Yasushi Yasumatsu
- B08 - CLEANING
Information Patent Grant
Ion beam processing apparatus, electrode assembly, and method of cl...
- Patent number 10,224,179
- Issue date Mar 5, 2019
- Canon Anelva Corporation
- Yasushi Yasumatsu
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CL...
- Publication number 20250014861
- Publication date Jan 9, 2025
- Canon ANELVA Corporation
- Yasushi Yasumatsu
- B08 - CLEANING
Information Patent Application
ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CL...
- Publication number 20220262598
- Publication date Aug 18, 2022
- Canon ANELVA Corporation
- Yasushi Yasumatsu
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220139686
- Publication date May 5, 2022
- Canon ANELVA Corporation
- Yuji TAKANAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CL...
- Publication number 20210104377
- Publication date Apr 8, 2021
- Canon ANELVA Corporation
- Yasushi Yasumatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20200343080
- Publication date Oct 29, 2020
- Canon ANELVA Corporation
- Yuji TAKANAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CL...
- Publication number 20190108973
- Publication date Apr 11, 2019
- Canon ANELVA Corporation
- Yasushi Yasumatsu
- B08 - CLEANING
Information Patent Application
ION BEAM ETCHING APPARATUS AND ION BEAM GENERATOR
- Publication number 20160351377
- Publication date Dec 1, 2016
- Canon ANELVA Corporation
- Naoyuki OKAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CL...
- Publication number 20160056016
- Publication date Feb 25, 2016
- Canon ANELVA Corporation
- Yasushi Yasumatsu
- B08 - CLEANING
Information Patent Application
SPUTTERING APPARATUS
- Publication number 20140291148
- Publication date Oct 2, 2014
- Toru ISHIMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Naoyuki OKAMOTO

Person

Patents Grantslast 30 patents

Ion beam processing apparatus, electrode assembly, and method of cl...

Substrate processing apparatus and substrate processing method

Ion beam processing apparatus, electrode assembly, and method of cl...

Substrate processing apparatus and substrate processing method

Ion beam processing apparatus, electrode assembly, and method of cl...

Ion beam processing apparatus, electrode assembly, and method of cl...

Patents Applicationslast 30 patents

ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CL...

ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CL...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CL...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CL...

ION BEAM ETCHING APPARATUS AND ION BEAM GENERATOR

ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CL...

SPUTTERING APPARATUS