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Naoyuki Satoh
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Nirasaki-Shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate placing table and substrate processing apparatus
Patent number
11,676,847
Issue date
Jun 13, 2023
Tokyo Electron Limited
Satoshi Taga
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Member for plasma processing apparatus and plasma processing appara...
Patent number
11,548,827
Issue date
Jan 10, 2023
Nippon Tungsten Co., Ltd.
Takashi Ikeda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate placing table and substrate processing apparatus
Patent number
11,508,603
Issue date
Nov 22, 2022
Tokyo Electron Limited
Satoshi Taga
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Member for plasma processing apparatus, plasma processing apparatus...
Patent number
11,434,174
Issue date
Sep 6, 2022
Nippon Tungsten Co., Ltd.
Takashi Ikeda
C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information
Patent Grant
Substrate placing table and substrate processing apparatus
Patent number
11,217,470
Issue date
Jan 4, 2022
Tokyo Electron Limited
Satoshi Taga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
10,622,196
Issue date
Apr 14, 2020
Tokyo Electron Limited
Nobuyuki Nagayama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Focus ring and plasma processing apparatus
Patent number
10,566,175
Issue date
Feb 18, 2020
Tokyo Electron Limited
Nobuyuki Nagayama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrode plate for plasma etching and plasma etching apparatus
Patent number
9,818,583
Issue date
Nov 14, 2017
Tokyo Electron Limited
Naoyuki Satoh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of affixing heat transfer sheet
Patent number
9,812,297
Issue date
Nov 7, 2017
Tokyo Electron Limited
Keita Kanbara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrode plate for plasma etching and plasma etching apparatus
Patent number
9,117,635
Issue date
Aug 25, 2015
Tokyo Electron Limited
Naoyuki Satoh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Surface processing method
Patent number
8,715,782
Issue date
May 6, 2014
Tokyo Electron Limited
Naoyuki Satoh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of reusing a consumable part for use in a plasma processing...
Patent number
8,475,622
Issue date
Jul 2, 2013
Tokyo Electron Limited
Nobuyuki Nagayama
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Surface processing method
Patent number
8,318,034
Issue date
Nov 27, 2012
Tokyo Electron Limited
Naoyuki Satoh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of reusing a consumable part for use in a plasma processing...
Patent number
8,221,579
Issue date
Jul 17, 2012
Tokyo Electron Limited
Nobuyuki Nagayama
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus and method
Patent number
7,867,926
Issue date
Jan 11, 2011
Tokyo Electron Limited
Naoyuki Satoh
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Transfer mask for exposure and pattern exchanging method of the same
Patent number
7,862,959
Issue date
Jan 4, 2011
Octec Inc.
Katsuya Okumura
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Manufacturing method for membrane member
Patent number
7,641,806
Issue date
Jan 5, 2010
Tokyo Electron Limited
Katsuya Okumura
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Change rate prediction method, storage medium, and substrate proces...
Patent number
7,473,567
Issue date
Jan 6, 2009
Tokyo Electron Limited
Kazuyuki Mitsuoka
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND COMPONENT FOR SEMICONDUCT...
Publication number
20230420226
Publication date
Dec 28, 2023
TOKYO ELECTRON LIMITED
Naoyuki SATOH
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS
Publication number
20230065448
Publication date
Mar 2, 2023
TOKYO ELECTRON LIMITED
Satoshi TAGA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
STRUCTURE OF MOUNTING TABLE AND SEMICONDUCTOR PROCESSING APPARATUS
Publication number
20220375777
Publication date
Nov 24, 2022
TOKYO ELECTRON LIMITED
Naoyuki SATOH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS
Publication number
20220084867
Publication date
Mar 17, 2022
TOKYO ELECTRON LIMITED
Satoshi TAGA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EDGE RING AND PLASMA PROCESSING APPARATUS
Publication number
20210305023
Publication date
Sep 30, 2021
TOKYO ELECTRON LIMITED
Masahiro OGASAWARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MEMBER FOR PLASMA PROCESSING APPARATUS, PLASMA PROCESSING APPARATUS...
Publication number
20200317583
Publication date
Oct 8, 2020
NIPPON TUNGSTEN CO., LTD.
Takashi IKEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MEMBER FOR PLASMA PROCESSING APPARATUS, PLASMA PROCESSING APPARATUS...
Publication number
20200317582
Publication date
Oct 8, 2020
NIPPON TUNGSTEN CO., LTD.
Takashi IKEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS
Publication number
20200211885
Publication date
Jul 2, 2020
TOKYO ELECTRON LIMITED
Satoshi TAGA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
STRUCTURE OF MOUNTING TABLE AND SEMICONDUCTOR PROCESSING APPARATUS
Publication number
20200185250
Publication date
Jun 11, 2020
TOKYO ELECTRON LIMITED
Naoyuki SATOH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PART FOR SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMICONDUCTOR MA...
Publication number
20190164727
Publication date
May 30, 2019
TOKYO ELECTRON LIMITED
Naoki SUGAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20190164726
Publication date
May 30, 2019
TOKYO ELECTRON LIMITED
Gen TAMAMUSHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FOCUS RING AND PLASMA PROCESSING APPARATUS
Publication number
20180240651
Publication date
Aug 23, 2018
TOKYO ELECTRON LIMITED
Nobuyuki NAGAYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STRUCTURE OF MOUNTING TABLE AND SEMICONDUCTOR PROCESSING APPARATUS
Publication number
20170207110
Publication date
Jul 20, 2017
TOKYO ELECTRON LIMITED
Naoyuki SATOH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND FOCUS RING
Publication number
20160042926
Publication date
Feb 11, 2016
TOKYO ELECTRON LIMITED
Takuya ISHIKAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ELECTRODE PLATE FOR PLASMA ETCHING AND PLASMA ETCHING APPARATUS
Publication number
20150348762
Publication date
Dec 3, 2015
TOKYO ELECTRON LIMITED
Naoyuki SATOH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FOCUS RING AND PLASMA PROCESSING APPARATUS
Publication number
20150114567
Publication date
Apr 30, 2015
Greene, Tweed Technologies, Inc.
Nobuyuki NAGAYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20150053348
Publication date
Feb 26, 2015
TOKYO ELECTRON LIMITED
Nobuyuki NAGAYAMA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF AFFIXING HEAT TRANSFER SHEET
Publication number
20140202631
Publication date
Jul 24, 2014
TOKYO ELECTRON LIMITED
Keita KANBARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONSUMABLE PART FOR USE IN A PLASMA PROCESSING APPARATUS
Publication number
20130284375
Publication date
Oct 31, 2013
Nobuyuki NAGAYAMA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SURFACE PROCESSING METHOD
Publication number
20130040055
Publication date
Feb 14, 2013
TOKYO ELECTRON LIMITED
Naoyuki SATOH
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF REUSING A CONSUMABLE PART FOR USE IN A PLASMA PROCESSING...
Publication number
20120258258
Publication date
Oct 11, 2012
TOKYO ELECTRON LIMITED
Nobuyuki NAGAYAMA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ELECTRODE PLATE FOR PLASMA ETCHING AND PLASMA ETCHING APPARATUS
Publication number
20120073753
Publication date
Mar 29, 2012
TOKYO ELECTRON LIMITED
Naoyuki SATOH
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SURFACE PROCESSING METHOD
Publication number
20110006037
Publication date
Jan 13, 2011
TOKYO ELECTRON LIMITED
Naoyuki SATOH
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF REUSING A CONSUMABLE PART FOR USE IN A PLASMA PROCESSING...
Publication number
20100314356
Publication date
Dec 16, 2010
TOKYO ELECTRON LIMITED
Nobuyuki NAGAYAMA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Substrate processing apparatus and method
Publication number
20090156019
Publication date
Jun 18, 2009
Naoyuki Satoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Membrane Structure and Method for Manufacturing the Same
Publication number
20090022946
Publication date
Jan 22, 2009
TOKYO ELECTRON LIMITED
Masato Hayashi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CHANGE RATE PREDICTION METHOD, STORAGE MEDIUM, AND SUBSTRATE PROCES...
Publication number
20070231459
Publication date
Oct 4, 2007
TOKYO ELECTRON LIMITED
Kazuyuki MITSUOKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Manufacturing method for membrane member
Publication number
20040251229
Publication date
Dec 16, 2004
Katsuya Okumura
B81 - MICRO-STRUCTURAL TECHNOLOGY