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Naoyuki SUZUKI
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Kawasaki-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate transfer apparatus and substrate processing system
Patent number
11,764,092
Issue date
Sep 19, 2023
Tokyo Electron Limited
Tatsuo Hatano
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
Temperature measuring mechanism, temperature measuring method, and...
Patent number
11,605,547
Issue date
Mar 14, 2023
Tokyo Electron Limited
Manabu Nakagawasai
G01 - MEASURING TESTING
Information
Patent Grant
Sputtering device
Patent number
11,414,747
Issue date
Aug 16, 2022
Tokyo Electron Limited
Junichi Takei
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Stage device and processing apparatus
Patent number
11,417,504
Issue date
Aug 16, 2022
Tokyo Electron Limited
Manabu Nakagawasai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Stage device and processing apparatus
Patent number
11,293,092
Issue date
Apr 5, 2022
Tokyo Electron Limited
Manabu Nakagawasai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Stage mechanism, processing apparatus, and method of operating the...
Patent number
11,282,733
Issue date
Mar 22, 2022
Tokyo Electron Limited
Yuuki Motomura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming later insulating films for MTJ
Patent number
10,910,215
Issue date
Feb 2, 2021
Tokyo Electron Limited
Naoki Watanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus
Patent number
10,468,237
Issue date
Nov 5, 2019
Tokyo Electron Limited
Atsushi Gomi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming apparatus
Patent number
10,392,688
Issue date
Aug 27, 2019
Tokyo Electron Limited
Junichi Takei
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus of processing workpiece in depressurized space
Patent number
10,381,258
Issue date
Aug 13, 2019
Tokyo Electron Limited
Takuya Umise
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fixing unit of plate-shaped member, PVD processing apparatus and fi...
Patent number
10,254,693
Issue date
Apr 9, 2019
Tokyo Electron Limited
Hiroyuki Yokohara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and processing apparatus for performing pre-treatment to for...
Patent number
10,068,798
Issue date
Sep 4, 2018
Tokyo Electron Limited
Hiroyuki Toshima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus
Patent number
10,049,860
Issue date
Aug 14, 2018
Tokyo Electron Limited
Atsushi Gomi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic attraction apparatus, electrostatic chuck and cooling...
Patent number
9,787,222
Issue date
Oct 10, 2017
Tokyo Electron Limited
Kaoru Yamamoto
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Cooling processing apparatus and method for operating the same
Patent number
9,673,078
Issue date
Jun 6, 2017
Tokyo Electron Limited
Tetsuya Miyashita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate heat treatment apparatus
Patent number
9,607,868
Issue date
Mar 28, 2017
Canon Anelva Corporation
Takuji Okada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Brake drive controlling device for promptly switching state of brak...
Patent number
9,224,546
Issue date
Dec 29, 2015
FANUC CORPORATION
Yasuyuki Matsumoto
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Servomotor drive device that drives servomotor connected to rotatin...
Patent number
8,847,539
Issue date
Sep 30, 2014
FANUC CORPORATION
Naoyuki Suzuki
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Ion beam generator
Patent number
8,378,576
Issue date
Feb 19, 2013
Canon Anelva Corporation
Einstein Noel Abarra
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Motor driving apparatus for driving and braking brake-equipped motor
Patent number
7,898,196
Issue date
Mar 1, 2011
Fanuc Ltd
Shinichi Horikoshi
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Motor driving controller
Patent number
6,914,790
Issue date
Jul 5, 2005
Fanuc Ltd
Shunsuke Matsubara
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Motor controller
Patent number
6,313,593
Issue date
Nov 6, 2001
Fanuc Ltd
Shunsuke Matsubara
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Servo amplifier unit
Patent number
6,292,363
Issue date
Sep 18, 2001
Fanuc Ltd
Tatsuo Shinohara
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Method of and an apparatus for protecting a regenerative resistor i...
Patent number
5,814,954
Issue date
Sep 29, 1998
Fanuc Ltd.
Naoyuki Suzuki
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Drive motor control unit
Patent number
4,908,738
Issue date
Mar 13, 1990
Fanuc Ltd.
Katsuo Kobari
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Terminal for connecting electronic components
Patent number
4,863,389
Issue date
Sep 5, 1989
Fanuc Ltd.
Katsuo Kobari
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE PROCESSING SYSTEM
Publication number
20230377927
Publication date
Nov 23, 2023
TOKYO ELECTRON LIMITED
Tatsuo HATANO
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE PROCESSING SYSTEM
Publication number
20220415688
Publication date
Dec 29, 2022
TOKYO ELECTRON LIMITED
Tatsuo HATANO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TRANSFER DEVICE AND SUBSTRATE PROCESSING SYSTEM
Publication number
20220415687
Publication date
Dec 29, 2022
Tokyo Electron Limited
Tatsuo HATANO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM THICKNESS MEASURING APPARATUS AND FILM THICKNESS MEASURING MET...
Publication number
20210285096
Publication date
Sep 16, 2021
TOKYO ELECTRON LIMITED
Masato SHINADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SPUTTER DEVICE
Publication number
20210262080
Publication date
Aug 26, 2021
TOKYO ELECTRON LIMITED
Junichi TAKEI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLACING TABLE STRUCTURE AND TREATMENT DEVICE
Publication number
20200381272
Publication date
Dec 3, 2020
TOKYO ELECTRON LIMITED
Shinji ORIMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE MEASURING MECHANISM, TEMPERATURE MEASURING METHOD, AND...
Publication number
20200303223
Publication date
Sep 24, 2020
TOKYO ELECTRON LIMITED
Manabu Nakagawasai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STAGE DEVICE AND PROCESSING APPARATUS
Publication number
20200131625
Publication date
Apr 30, 2020
TOKYO ELECTRON LIMITED
Manabu NAKAGAWASAI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
STAGE DEVICE AND PROCESSING APPARATUS
Publication number
20200135434
Publication date
Apr 30, 2020
TOKYO ELECTRON LIMITED
Manabu NAKAGAWASAI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
STAGE MECHANISM, PROCESSING APPARATUS, AND METHOD OF OPERATING THE...
Publication number
20200035537
Publication date
Jan 30, 2020
TOKYO ELECTRON LIMITED
Yuuki MOTOMURA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE STAGE AND FILM FORMING APPARATUS
Publication number
20190390326
Publication date
Dec 26, 2019
TOKYO ELECTRON LIMITED
Junichi Takei
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SPUTTERING DEVICE
Publication number
20190390325
Publication date
Dec 26, 2019
TOKYO ELECTRON LIMITED
Junichi TAKEI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20180315585
Publication date
Nov 1, 2018
TOKYO ELECTRON LIMITED
Atsushi Gomi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM FORMING APPARATUS
Publication number
20180155817
Publication date
Jun 7, 2018
Junichi TAKEI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of Forming Insulating Film
Publication number
20180012756
Publication date
Jan 11, 2018
TOKYO ELECTRON LIMITED
Naoki WATANABE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND PROCESSING APPARATUS FOR PERFORMING PRE-TREATMENT TO FOR...
Publication number
20170372951
Publication date
Dec 28, 2017
TOKYO ELECTRON LIMITED
Hiroyuki TOSHIMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS OF PROCESSING WORKPIECE IN DEPRESSURIZED SPACE
Publication number
20170162424
Publication date
Jun 8, 2017
TOKYO ELECTRON LIMITED
Takuya UMISE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FIXING UNIT OF PLATE-SHAPED MEMBER, PVD PROCESSING APPARATUS AND FI...
Publication number
20150370204
Publication date
Dec 24, 2015
TOKYO ELECTRON LIMITED
Hiroyuki YOKOHARA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Substrate Processing System, Gate Valve and Substrate Transfer Method
Publication number
20150371812
Publication date
Dec 24, 2015
TOKYO ELECTRON LIMITED
Kouji MAEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COOLING PROCESSING APPARATUS AND METHOD FOR OPERATING THE SAME
Publication number
20150357222
Publication date
Dec 10, 2015
TOKYO ELECTRON LIMITED
Tetsuya MIYASHITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC ATTRACTION APPARATUS, ELECTROSTATIC CHUCK AND COOLING...
Publication number
20150349668
Publication date
Dec 3, 2015
TOKYO ELECTRON LIMITED
Kaoru Yamamoto
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20150235815
Publication date
Aug 20, 2015
TOKYO ELECTRON LIMITED
Atsushi Gomi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BRAKE DRIVE CONTROLLING DEVICE FOR PROMPTLY SWITCHING STATE OF BRAK...
Publication number
20140125149
Publication date
May 8, 2014
FANUC CORPORATION
Yasuyuki MATSUMOTO
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Application
SUBSTRATE HEAT TREATMENT APPARATUS
Publication number
20130272686
Publication date
Oct 17, 2013
Takuji OKADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SERVOMOTOR DRIVE DEVICE THAT DRIVES SERVOMOTOR CONNECTED TO ROTATIN...
Publication number
20130113411
Publication date
May 9, 2013
FANUC CORPORATION
Naoyuki SUZUKI
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Application
VACUUM HEATING AND COOLING APPARATUS
Publication number
20110253037
Publication date
Oct 20, 2011
Canon ANELVA Corporation
Koji Tsunekawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION BEAM GENERATOR
Publication number
20110139998
Publication date
Jun 16, 2011
Canon ANELVA Corporation
Einstein Noel ABARRA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SERVO AMPLIFIER WITH REGENERATIVE FUNCTION
Publication number
20090230898
Publication date
Sep 17, 2009
FANUC LTD.
Shunsuke Matsubara
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Application
MOTOR DRIVING APPARATUS FOR DRIVING AND BRAKING BRAKE-EQUIPPED MOTOR
Publication number
20080116828
Publication date
May 22, 2008
FANUC LTD.
Shinichi HORIKOSHI
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Application
Printed circuit board structure for motor driving device
Publication number
20050185387
Publication date
Aug 25, 2005
FANUC LTD.
Naoyuki Suzuki
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR