Naoyuki Umehara

Person

Miyagi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma generating method
- Patent number 10,615,005
- Issue date Apr 7, 2020
- Tokyo Electron Limited
- Koichi Nagami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 10,264,662
- Issue date Apr 16, 2019
- Tokyo Electron Limited
- Manabu Iwata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for impedance matching of plasma processing apparatus
- Patent number 9,736,921
- Issue date Aug 15, 2017
- Tokyo Electron Limited
- Koichi Nagami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 9,640,368
- Issue date May 2, 2017
- Tokyo Electron Limited
- Naoyuki Umehara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 8,038,833
- Issue date Oct 18, 2011
- Tokyo Electron Limited
- Satoshi Maebashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrical joint forming member and plasma processing apparatus
- Patent number 7,008,275
- Issue date Mar 7, 2006
- Tokyo Electron Limited
- Toshihiro Hayami
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA GENERATING METHOD
- Publication number 20190318915
- Publication date Oct 17, 2019
- TOKYO ELECTRON LIMITED
- Koichi NAGAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20190318912
- Publication date Oct 17, 2019
- TOKYO ELECTRON LIMITED
- Naoyuki UMEHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR IMPEDANCE MATCHING OF PLASMA PROCESSING APPARATUS
- Publication number 20170099723
- Publication date Apr 6, 2017
- TOKYO ELECTRON LIMITED
- Koichi Nagami
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20140345802
- Publication date Nov 27, 2014
- Naoyuki Umehara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20130199727
- Publication date Aug 8, 2013
- TOKYO ELECTRON LIMITED
- Manabu IWATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRICAL JOINT MEMBER FOR REDUCING AN ELECTRICAL RESISTANCE BETWE...
- Publication number 20120009829
- Publication date Jan 12, 2012
- TOKYO ELECTRON LIMITED
- Satoshi Maebashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPRATUS AND METHOD AND APPARATUS FOR MEASURING D...
- Publication number 20090277585
- Publication date Nov 12, 2009
- TOKYO ELECTRON LIMITED
- Satoshi Maebashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing apparatus and method and apparatus for measuring...
- Publication number 20050095732
- Publication date May 5, 2005
- TOKYO ELECTRON LIMITED
- Satoshi Maebashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrical joint forming member and plasma processing apparatus
- Publication number 20050070174
- Publication date Mar 31, 2005
- Toshihiro Hayami
- H01 - BASIC ELECTRIC ELEMENTS

Naoyuki Umehara

Person

Patents Grantslast 30 patents

Plasma generating method

Plasma processing apparatus

Method for impedance matching of plasma processing apparatus

Plasma processing apparatus

Plasma processing apparatus

Electrical joint forming member and plasma processing apparatus

Patents Applicationslast 30 patents

PLASMA GENERATING METHOD

PLASMA PROCESSING APPARATUS

METHOD FOR IMPEDANCE MATCHING OF PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS

ELECTRICAL JOINT MEMBER FOR REDUCING AN ELECTRICAL RESISTANCE BETWE...

PLASMA PROCESSING APPRATUS AND METHOD AND APPARATUS FOR MEASURING D...

Plasma processing apparatus and method and apparatus for measuring...

Electrical joint forming member and plasma processing apparatus