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Naozo Sugimoto
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Tokyo, JP
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last 30 patents
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Patent Grant
X-ray nondestructive testing device
Patent number
9,863,897
Issue date
Jan 9, 2018
TOKYO ELECTRON LIMITED
Naozo Sugimoto
G01 - MEASURING TESTING
Information
Patent Grant
Wafer thermometer, temperature measuring device, heat treatment dev...
Patent number
8,378,269
Issue date
Feb 19, 2013
Tokyo Electron Limited
Toshiyuki Matsumoto
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
X-RAY NONDESTRUCTIVE TESTING DEVICE
Publication number
20150377801
Publication date
Dec 31, 2015
TOKYO ELECTRON LIMITED
Naozo SUGIMOTO
G01 - MEASURING TESTING
Information
Patent Application
WAFER THERMOMETER, TEMPERATURE MEASURING DEVICE, HEAT TREATMENT DEV...
Publication number
20090242545
Publication date
Oct 1, 2009
TOKYO ELECTRON LIMITED
Toshiyuki Matsumoto
G01 - MEASURING TESTING