Narayanan Meyyappan

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Woburn, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method of treating silicon to obtain thin, buried insulating layer
- Patent number 5,589,407
- Issue date Dec 31, 1996
- Implanted Material Technology, Inc.
- Narayanan Meyyappan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shallow SIMOX processing method using molecular ion implantation
- Patent number 5,436,175
- Issue date Jul 25, 1995
- Sharp Microelectronics Technology, Inc.
- Tatsuo Nakato
- H01 - BASIC ELECTRIC ELEMENTS