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Narishi Gonohe
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Susono-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method for forming tantalum nitride film
Patent number
8,796,142
Issue date
Aug 5, 2014
ULVAC, Inc.
Narishi Gonohe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing film
Patent number
8,216,642
Issue date
Jul 10, 2012
Ulvac, Inc.
Masamichi Harada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for forming tantalum nitride film
Patent number
8,158,198
Issue date
Apr 17, 2012
ULVAC, Inc.
Narishi Gonohe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for forming tantalum nitride film
Patent number
8,158,197
Issue date
Apr 17, 2012
ULVAC, Inc.
Narishi Gonohe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for forming tantalum nitride film
Patent number
8,105,468
Issue date
Jan 31, 2012
ULVAC, Inc.
Narishi Gonohe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Selective W-CVD method and method for forming multi-layered Cu elec...
Patent number
7,790,590
Issue date
Sep 7, 2010
ULVAC, Inc.
Narishi Gonohe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for forming tungsten nitride film
Patent number
7,338,900
Issue date
Mar 4, 2008
Ulvac Inc.
Eiichi Mizuno
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
Method for Forming Tantalum Nitride Film
Publication number
20100206716
Publication date
Aug 19, 2010
Narishi Gonohe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR FORMING TANTALUM NITRIDE FILM
Publication number
20090246375
Publication date
Oct 1, 2009
Narishi Gonohe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Apparatus and Method of Film Formation
Publication number
20090232984
Publication date
Sep 17, 2009
Narishi Gonohe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for Forming Tantalum Nitride Film
Publication number
20090159430
Publication date
Jun 25, 2009
Narishi Gonohe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for Forming Tantalum Nitride Film
Publication number
20090162565
Publication date
Jun 25, 2009
Narishi Gonohe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for Forming Tantalum Nitride Film
Publication number
20090159431
Publication date
Jun 25, 2009
Narishi Gonohe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for Forming Tantalum Nitride Film
Publication number
20090104775
Publication date
Apr 23, 2009
Narishi Gonohe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
BIAS SPUTTERING FILM FORMING PROCESS AND BIAS SPUTTERING FILM FORMI...
Publication number
20090095617
Publication date
Apr 16, 2009
Ulvac, Inc.
Myounggoo Lee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Selective W-Cvd Method and Method for Forming Multi-Layered Cu Elec...
Publication number
20080311741
Publication date
Dec 18, 2008
Narishi Gonohe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for Forming Tantalum Nitride Film
Publication number
20080199601
Publication date
Aug 21, 2008
Narishi Gonohe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of cleaning surface of semiconductor substrate, method of ma...
Publication number
20070178234
Publication date
Aug 2, 2007
ULVAC, Inc.
Masamichi Harada
B08 - CLEANING
Information
Patent Application
Method for forming tungsten nitride film
Publication number
20050221625
Publication date
Oct 6, 2005
ULVAC, Inc.
Eiichi Mizuno
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of cleaning surface of semiconductor substrate, method of ma...
Publication number
20050118810
Publication date
Jun 2, 2005
ULVAC,INC
Masamichi Harada
B08 - CLEANING
Information
Patent Application
Bias sputtering film forming process and bias sputtering film formi...
Publication number
20040050687
Publication date
Mar 18, 2004
ULVAC, Inc.
Myounggoo Lee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...