Natalia Doubina

Person

Portland, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Process for optimizing cobalt electrofill using sacrificial oxidants
- Patent number 11,078,591
- Issue date Aug 3, 2021
- Lam Research Corporation
- Lee J. Brogan
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Process for optimizing cobalt electrofill using sacrificial oxidants
- Patent number 10,329,683
- Issue date Jun 25, 2019
- Lam Research Corporation
- Lee J. Brogan
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Method and apparatus for remote plasma treatment for reducing metal...
- Patent number 9,865,501
- Issue date Jan 9, 2018
- Lam Research Corporation
- Tighe A. Spurlin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemistry additives and process for cobalt film electrodeposition
- Patent number 9,777,386
- Issue date Oct 3, 2017
- Lam Research Corporation
- Natalia V. Doubina
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Two step process for uniform across wafer deposition and void free...
- Patent number 7,799,684
- Issue date Sep 21, 2010
- Novellus Systems, Inc.
- Jonathan Reid
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Patents Applicationslast 30 patents

Information Patent Application
ELECTROPLATING COBALT, NICKEL, AND ALLOYS THEREOF
- Publication number 20230178430
- Publication date Jun 8, 2023
- LAM RESEARCH CORPORATION
- Natalia V. Doubina
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS FOR OPTIMIZING COBALT ELECTROFILL USING SACRIFICIAL OXIDANTS
- Publication number 20190271094
- Publication date Sep 5, 2019
- LAM RESEARCH CORPORATION
- Lee J. Brogan
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD AND APPARATUS FOR REMOTE PLASMA TREATMENT FOR REDUCING METAL...
- Publication number 20180350670
- Publication date Dec 6, 2018
- LAM RESEARCH CORPORATION
- Tighe A. Spurlin
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
PROCESS FOR OPTIMIZING COBALT ELECTROFILL USING SACRIFICIAL OXIDANTS
- Publication number 20180119305
- Publication date May 3, 2018
- LAM RESEARCH CORPORATION
- Lee J. Brogan
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
CHEMISTRY ADDITIVES AND PROCESS FOR COBALT FILM ELECTRODEPOSITION
- Publication number 20160273117
- Publication date Sep 22, 2016
- LAM RESEARCH CORPORATION
- Natalia V. Doubina
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD AND APPARATUS FOR PREPARING A SUBSTRATE WITH A SEMI-NOBLE ME...
- Publication number 20150299886
- Publication date Oct 22, 2015
- LAM RESEARCH CORPORATION
- Natalia V. Doubina
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD AND APPARATUS FOR REMOTE PLASMA TREATMENT FOR REDUCING METAL...
- Publication number 20140256128
- Publication date Sep 11, 2014
- Tighe A. Spurlin
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Natalia Doubina

Person

Patents Grantslast 30 patents

Process for optimizing cobalt electrofill using sacrificial oxidants

Process for optimizing cobalt electrofill using sacrificial oxidants

Method and apparatus for remote plasma treatment for reducing metal...

Chemistry additives and process for cobalt film electrodeposition

Two step process for uniform across wafer deposition and void free...

Patents Applicationslast 30 patents

ELECTROPLATING COBALT, NICKEL, AND ALLOYS THEREOF

PROCESS FOR OPTIMIZING COBALT ELECTROFILL USING SACRIFICIAL OXIDANTS

METHOD AND APPARATUS FOR REMOTE PLASMA TREATMENT FOR REDUCING METAL...

PROCESS FOR OPTIMIZING COBALT ELECTROFILL USING SACRIFICIAL OXIDANTS

CHEMISTRY ADDITIVES AND PROCESS FOR COBALT FILM ELECTRODEPOSITION

METHOD AND APPARATUS FOR PREPARING A SUBSTRATE WITH A SEMI-NOBLE ME...

METHOD AND APPARATUS FOR REMOTE PLASMA TREATMENT FOR REDUCING METAL...