Nate Richard

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Peabody, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck with polymer protrusions
- Patent number 8,879,233
- Issue date Nov 4, 2014
- Entegris, Inc.
- Richard A. Cooke
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Electrostatic Chuck With Polymer Protrusions
- Publication number 20120044609
- Publication date Feb 23, 2012
- Richard A. Cooke
- H01 - BASIC ELECTRIC ELEMENTS