Nathan D. Stein

Follow

Person

Mountain View, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Single wafer apparatus for drying semiconductor substrates using an...
- Patent number 8,322,045
- Issue date Dec 4, 2012
- Applied Materials, Inc.
- Nathan D. Stein
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SINGLE WAFER METHOD AND APPARATUS FOR DRYING SEMICONDUCTOR SUBSTRAT...
- Publication number 20090078292
- Publication date Mar 26, 2009
- Applied Materials, Inc.
- Nathan D. Stein
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SINGLE WAFER METHOD AND APPARATUS FOR DRYING SEMICONDUCTOR SUBSTRAT...
- Publication number 20090044839
- Publication date Feb 19, 2009
- Applied Materials, Inc.
- Nathan D. Stein
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SINGLE WAFER METHOD AND APPARATUS FOR DRYING SEMICONDUCTOR SUBSTRAT...
- Publication number 20090032068
- Publication date Feb 5, 2009
- Applied Materials, Inc.
- Nathan D. Stein
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Single wafer method and apparatus for drying semiconductor substrat...
- Publication number 20040031167
- Publication date Feb 19, 2004
- Nathan D. Stein
- H01 - BASIC ELECTRIC ELEMENTS