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Nathan E. Baxter
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Arlington, MA, US
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last 30 patents
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Patent Grant
Method for enhancing a substrate using gas cluster ion beam processing
Patent number
8,877,299
Issue date
Nov 4, 2014
TEL Epion Inc.
John J. Hautala
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for modifying a material layer using gas cluster ion beam pr...
Patent number
8,592,784
Issue date
Nov 26, 2013
TEL Epion Inc.
John J. Hautala
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for modifying a material layer using gas cluster ion beam pr...
Patent number
7,982,196
Issue date
Jul 19, 2011
TEL Epion Inc.
John J. Hautala
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
METHOD FOR MODIFYING A MATERIAL LAYER USING GAS CLUSTER ION BEAM PR...
Publication number
20110266466
Publication date
Nov 3, 2011
TEL Epion Inc.
John J. Hautala
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MODIFYING A MATERIAL LAYER USING GAS CLUSTER ION BEAM PR...
Publication number
20100243919
Publication date
Sep 30, 2010
TEL Epion Inc.
John J. Hautala
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR ENHANCING A SUBSTRATE USING GAS CLUSTER ION BEAM PROCESSING
Publication number
20100243920
Publication date
Sep 30, 2010
TEL Epion Inc.
John J. Hautala
H01 - BASIC ELECTRIC ELEMENTS