Nathan Fo

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Santa Clara, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for multi-target sputtering
- Patent number 6,635,154
- Issue date Oct 21, 2003
- Intevac, Inc.
- Paul Markoff Johnson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for multi-target sputtering
- Publication number 20030085114
- Publication date May 8, 2003
- Paul Markoff Johnson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...