Nathan LAVDOVSKY

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for processing wafer-shaped articles
- Patent number 11,195,730
- Issue date Dec 7, 2021
- Lam Research AG
- Rainer Obweger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for processing wafer-shaped articles
- Patent number 10,490,426
- Issue date Nov 26, 2019
- Lam Research AG
- Rainer Obweger
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES
- Publication number 20160064242
- Publication date Mar 3, 2016
- LAM RESEARCH AG
- Rainer OBWEGER
- H01 - BASIC ELECTRIC ELEMENTS