Nathan MUSSELWHITE

Person

OAKLAND, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Efficient cleaning and etching of high aspect ratio structures
- Patent number 11,488,831
- Issue date Nov 1, 2022
- Lam Research Corporation
- Ji Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal doped carbon based hard mask removal in semiconductor fabrica...
- Patent number 11,062,897
- Issue date Jul 13, 2021
- Lam Research Corporation
- Yongsik Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for processing wafer-shaped articles
- Patent number 10,446,416
- Issue date Oct 15, 2019
- Lam Research AG
- David Mui
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SELECTIVE PRECISION ETCHING OF SEMICONDUCTOR MATERIALS
- Publication number 20230207328
- Publication date Jun 29, 2023
- LAM RESEARCH CORPORATION
- Nathan MUSSELWHITE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EFFICIENT CLEANING AND ETCHING OF HIGH ASPECT RATIO STRUCTURES
- Publication number 20230035732
- Publication date Feb 2, 2023
- LAM RESEARCH CORPORATION
- Ji ZHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPOR CLEANING OF SUBSTRATE SURFACES
- Publication number 20220356585
- Publication date Nov 10, 2022
- LAM RESEARCH CORPORATION
- David MUI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM STACK SIMPLIFICATION FOR HIGH ASPECT RATIO PATTERNING AND VERT...
- Publication number 20220051938
- Publication date Feb 17, 2022
- LAM RESEARCH CORPORATION
- Hui-Jung Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EFFICIENT CLEANING AND ETCHING OF HIGH ASPECT RATIO STRUCTURES
- Publication number 20210249274
- Publication date Aug 12, 2021
- LAM RESEARCH CORPORATION
- Ji ZHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METAL DOPED CARBON BASED HARD MASK REMOVAL IN SEMICONDUCTOR FABRICA...
- Publication number 20180358220
- Publication date Dec 13, 2018
- LAM RESEARCH CORPORATION
- Yongsik Yu
- C01 - INORGANIC CHEMISTRY
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES
- Publication number 20180047593
- Publication date Feb 15, 2018
- LAM RESEARCH AG
- David MUI
- H01 - BASIC ELECTRIC ELEMENTS

Nathan MUSSELWHITE

Person

Patents Grantslast 30 patents

Efficient cleaning and etching of high aspect ratio structures

Metal doped carbon based hard mask removal in semiconductor fabrica...

Method and apparatus for processing wafer-shaped articles

Patents Applicationslast 30 patents

SELECTIVE PRECISION ETCHING OF SEMICONDUCTOR MATERIALS

EFFICIENT CLEANING AND ETCHING OF HIGH ASPECT RATIO STRUCTURES

VAPOR CLEANING OF SUBSTRATE SURFACES

FILM STACK SIMPLIFICATION FOR HIGH ASPECT RATIO PATTERNING AND VERT...

EFFICIENT CLEANING AND ETCHING OF HIGH ASPECT RATIO STRUCTURES

METAL DOPED CARBON BASED HARD MASK REMOVAL IN SEMICONDUCTOR FABRICA...

METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES