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Nathan R.C. Kemeling
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Tokyo, JP
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last 30 patents
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Patent Grant
Method of forming interconnection in semiconductor device
Patent number
7,354,852
Issue date
Apr 8, 2008
ASM Japan K.K.
Kiyohiro Matsushita
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Method of forming interconnection in semiconductor device
Publication number
20060160352
Publication date
Jul 20, 2006
ASM JAPAN K.K.
Kiyohiro Matsushita
H01 - BASIC ELECTRIC ELEMENTS