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Nathan Roth
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Peabody, MA, US
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last 30 patents
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Patent Grant
Method and mechanism for erosion detection of defining apertures
Patent number
9,299,534
Issue date
Mar 29, 2016
Varian Semiconductor Equipment Associates, Inc.
David Timberlake
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
METHOD AND MECHANISM FOR EROSION DETECTION OF DEFINING APERTURES
Publication number
20150221472
Publication date
Aug 6, 2015
Varian Semiconductor Equipment Associates, Inc.
David Timberlake
H01 - BASIC ELECTRIC ELEMENTS