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Nathan Speer
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Oak Park, IL, US
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last 30 patents
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Patent Grant
Polyurethane CMP pads having a high modulus ratio
Patent number
10,562,149
Issue date
Feb 18, 2020
Cabot Microelectronics Corporation
Lin Fu
B24 - GRINDING POLISHING
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last 30 patents
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Patent Application
POLYURETHANE CMP PADS HAVING A HIGH MODULUS RATIO
Publication number
20170087688
Publication date
Mar 30, 2017
Cabot Microelectronics Corporation
Lin FU
B24 - GRINDING POLISHING