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Nathanael R.C. Kemeling
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Tokyo-To, JP
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Patents Grants
last 30 patents
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Patent Grant
Plasma pre-treating surfaces for atomic layer deposition
Patent number
7,498,242
Issue date
Mar 3, 2009
ASM America, Inc.
Devendra Kumar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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last 30 patents
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Patent Application
Plasma pre-treating surfaces for atomic layer deposition
Publication number
20060216932
Publication date
Sep 28, 2006
Devendra Kumar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...