Natsuki HIRATA

Person

Handa-City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Wafer-heating device
- Patent number 11,515,180
- Issue date Nov 29, 2022
- NGK Insulators, Ltd.
- Hiroshi Takebayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck heater
- Patent number 10,930,539
- Issue date Feb 23, 2021
- NGK Insulators, Ltd.
- Rishun Kin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal wiring bonding structure and production method therefor
- Patent number 10,668,558
- Issue date Jun 2, 2020
- NGK Insulators, Ltd.
- Hiroshi Takebayashi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Electrostatic chuck heater
- Patent number 10,483,146
- Issue date Nov 19, 2019
- NGK Insulators, Ltd.
- Hiroshi Takebayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal wiring bonding structure and production method therefor
- Patent number 10,029,328
- Issue date Jul 24, 2018
- NGK Insulators, Ltd.
- Rishun Kin
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
WAFER PLACEMENT TABLE
- Publication number 20240297062
- Publication date Sep 5, 2024
- NGK Insulators, Ltd.
- Seiya INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20240186170
- Publication date Jun 6, 2024
- NGK Insulators, Ltd.
- Natsuki HIRATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF ADJUSTING HEAT UNIFORMITY ON WAFER MOUNT AND METHOD OF MA...
- Publication number 20240120216
- Publication date Apr 11, 2024
- NGK Insulators, Ltd.
- Hiroya SUGIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20240038567
- Publication date Feb 1, 2024
- NGK Insulators, Ltd.
- Seiya INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20230223291
- Publication date Jul 13, 2023
- NGK Insulators, Ltd.
- Seiya INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CERAMIC HEATER AND METHOD OF MANUFACTURING THE CERAMIC HEATER
- Publication number 20220377850
- Publication date Nov 24, 2022
- NGK Insulators, Ltd.
- Takayoshi AKAO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
CERAMIC HEATER AND METHOD OF MANUFACTURING THE CERAMIC HEATER
- Publication number 20220369425
- Publication date Nov 17, 2022
- NGK Insulators, Ltd.
- Takayoshi AKAO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
WAFER-HEATING DEVICE
- Publication number 20190385871
- Publication date Dec 19, 2019
- NGK Insulators, Ltd.
- Hiroshi Takebayashi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
ELECTROSTATIC CHUCK HEATER
- Publication number 20180190529
- Publication date Jul 5, 2018
- NGK Insulators, Ltd.
- Hiroshi Takebayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK HEATER
- Publication number 20180047606
- Publication date Feb 15, 2018
- NGK Insulators, Ltd.
- Rishun KIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLEXIBLE BOARD AND PRODUCTION METHOD FOR METAL WIRING BONDING STRUC...
- Publication number 20180007780
- Publication date Jan 4, 2018
- NGK Insulators, Ltd.
- Hiroshi TAKEBAYASHI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METAL WIRING BONDING STRUCTURE AND PRODUCTION METHOD THEREFOR
- Publication number 20170282286
- Publication date Oct 5, 2017
- NGK Insulators, Ltd.
- Rishun KIN
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METAL WIRING BONDING STRUCTURE AND PRODUCTION METHOD THEREFOR
- Publication number 20170290099
- Publication date Oct 5, 2017
- NGK Insulators, Ltd.
- Hiroshi TAKEBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS

Natsuki HIRATA

Person

Patents Grantslast 30 patents

Wafer-heating device

Electrostatic chuck heater

Metal wiring bonding structure and production method therefor

Electrostatic chuck heater

Metal wiring bonding structure and production method therefor

Patents Applicationslast 30 patents

WAFER PLACEMENT TABLE

MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS

METHOD OF ADJUSTING HEAT UNIFORMITY ON WAFER MOUNT AND METHOD OF MA...

MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS

MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS

CERAMIC HEATER AND METHOD OF MANUFACTURING THE CERAMIC HEATER

CERAMIC HEATER AND METHOD OF MANUFACTURING THE CERAMIC HEATER

WAFER-HEATING DEVICE

ELECTROSTATIC CHUCK HEATER

ELECTROSTATIC CHUCK HEATER

FLEXIBLE BOARD AND PRODUCTION METHOD FOR METAL WIRING BONDING STRUC...

METAL WIRING BONDING STRUCTURE AND PRODUCTION METHOD THEREFOR

METAL WIRING BONDING STRUCTURE AND PRODUCTION METHOD THEREFOR