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Natsuki Makino
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Tokyo, JP
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last 30 patents
Information
Patent Grant
Substrate processing apparatus, substrate processing method, substr...
Patent number
11,426,834
Issue date
Aug 30, 2022
Ebara Corporation
Mitsuru Miyazaki
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate processing apparatus, substrate processing method, substr...
Patent number
10,486,285
Issue date
Nov 26, 2019
Ebara Corporation
Mitsuru Miyazaki
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate processing apparatus, substrate processing method, substr...
Patent number
9,687,957
Issue date
Jun 27, 2017
Ebara Corporation
Mitsuru Miyazaki
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate processing apparatus, substrate processing method, substr...
Patent number
9,358,662
Issue date
Jun 7, 2016
Ebara Corporation
Mitsuru Miyazaki
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate processing apparatus, substrate processing method, substr...
Patent number
8,795,032
Issue date
Aug 5, 2014
Ebara Corporation
Mitsuru Miyazaki
B24 - GRINDING POLISHING
Information
Patent Grant
Circuit board, semiconductor device, process for manufacturing circ...
Patent number
8,742,568
Issue date
Jun 3, 2014
Sumitomo Bakelite Company, Ltd.
Masayoshi Kondo
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Hand having rocking mechanism and substrate delivering device havin...
Patent number
8,038,136
Issue date
Oct 18, 2011
Kabushiki Kaisha Yaskawa Denki
Hiroki Sanemasa
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Plating apparatus
Patent number
7,901,550
Issue date
Mar 8, 2011
Ebara Corporation
Natsuki Makino
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Electrolytic processing apparatus and method
Patent number
7,442,282
Issue date
Oct 28, 2008
Ebara Corporation
Natsuki Makino
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Method of performing electrolytic treatment on a conductive layer o...
Patent number
7,387,717
Issue date
Jun 17, 2008
Ebara Corporation
Junji Kunisawa
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Electrolytic processing apparatus and substrate processing method
Patent number
7,374,646
Issue date
May 20, 2008
Ebara Corporation
Hidenao Suzuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate plating apparatus
Patent number
7,208,074
Issue date
Apr 24, 2007
Ebara Corporation
Koji Mishima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electroplating apparatus and electroplating method
Patent number
6,767,437
Issue date
Jul 27, 2004
Kabushiki Kaisha Toshiba
Tetsuo Matsuda
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Plating method and plating apparatus
Patent number
6,746,589
Issue date
Jun 8, 2004
Ebara Corporation
Koji Mishima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate plating apparatus
Patent number
6,689,257
Issue date
Feb 10, 2004
Ebara Corporation
Koji Mishima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plating apparatus
Patent number
6,632,335
Issue date
Oct 14, 2003
Ebara Corporation
Junji Kunisawa
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, SUBSTR...
Publication number
20200047309
Publication date
Feb 13, 2020
Mitsuru MIYAZAKI
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, SUBSTR...
Publication number
20170252894
Publication date
Sep 7, 2017
EBARA CORPORATION
Mitsuru Miyazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, SUBSTR...
Publication number
20150050863
Publication date
Feb 19, 2015
EBARA CORPORATION
Mitsuru MIYAZAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, SUBSTR...
Publication number
20140302676
Publication date
Oct 9, 2014
Mitsuru MIYAZAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CIRCUIT BOARD, SEMICONDUCTOR DEVICE, PROCESS FOR MANUFACTURING CIRC...
Publication number
20130015582
Publication date
Jan 17, 2013
SUMITOMO BAKELITE CO., LTD.
Masayoshi Kondo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate processing apparatus, substrate processing method, substr...
Publication number
20090305612
Publication date
Dec 10, 2009
EBARA CORPORATION
Mitsuru Miyazaki
B24 - GRINDING POLISHING
Information
Patent Application
HAND HAVING ROCKING MECHANISM AND SUBSTRATE DELIVERING DEVICE HAVIN...
Publication number
20090236786
Publication date
Sep 24, 2009
KABUSHIKI KAISHA YASKAWA DENKI
Hiroki SANEMASA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plating method
Publication number
20090095634
Publication date
Apr 16, 2009
Natsuki Makino
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Plating apparatus
Publication number
20090095618
Publication date
Apr 16, 2009
Natsuki Makino
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
PLATING APPARATUS
Publication number
20080296165
Publication date
Dec 4, 2008
Junji Kunisawa
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
PLATING APPARATUS
Publication number
20080251385
Publication date
Oct 16, 2008
Junji Kunisawa
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Cleaning method and cleaning apparatus for porous member
Publication number
20080035171
Publication date
Feb 14, 2008
Hiroyuki Kanda
B08 - CLEANING
Information
Patent Application
Electrolytic processing apparatus and method
Publication number
20070034526
Publication date
Feb 15, 2007
Natsuki Makino
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Substrate processing apparatus and substrate plating apparatus
Publication number
20060027452
Publication date
Feb 9, 2006
Koji Mishima
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Electrolytic processing apparatus and method
Publication number
20050155865
Publication date
Jul 21, 2005
Koji Mishima
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Plating apparatus, plating method and substrate processing apparatus
Publication number
20050023149
Publication date
Feb 3, 2005
Tsutomu Nakada
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Electrolytic processing apparatus and substrate processing method
Publication number
20040256238
Publication date
Dec 23, 2004
Hidenao Suzuki
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Plating method and plating apparatus
Publication number
20040195106
Publication date
Oct 7, 2004
Koji Mishima
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Substrate processing apparatus and substrate plating apparatus
Publication number
20040134789
Publication date
Jul 15, 2004
Koji Mishima
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Electrolytic processing apparatus and method
Publication number
20040129576
Publication date
Jul 8, 2004
Natsuki Makino
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Plating apparatus
Publication number
20040069646
Publication date
Apr 15, 2004
Junji Kunisawa
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Plating method and plating apparatus
Publication number
20020056647
Publication date
May 16, 2002
Koji Mishima
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Plating apparatus and plating method for substrate
Publication number
20020033339
Publication date
Mar 21, 2002
Norio Kimura
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Plating apparatus and plating method for substrate
Publication number
20020020627
Publication date
Feb 21, 2002
Junji Kunisawa
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Substrate processing apparatus and substrate plating apparatus
Publication number
20020000371
Publication date
Jan 3, 2002
Koji Mishima
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Electroplating apparatus and electroplating method
Publication number
20020000379
Publication date
Jan 3, 2002
Tetsuo Matsuda
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Semiconductor substrate processing apparatus and method
Publication number
20010024691
Publication date
Sep 27, 2001
Norio Kimura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...