Natsuki YABUMOTO

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing method and plasma processing apparatus
- Patent number 9,330,891
- Issue date May 3, 2016
- Tokyo Electron Limited
- Ryo Nonaka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20150114930
- Publication date Apr 30, 2015
- TOKYO ELECTRON LIMITED
- Ryo NONAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...