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Naveen Kumar Nagaraja
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Karnataka, IN
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Patents Grants
last 30 patents
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Patent Grant
Wafer heater with backside and integrated bevel purge
Patent number
11,769,684
Issue date
Sep 26, 2023
Applied Materials, Inc.
Tejas Ulavi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Wafer Heater With Backside And Integrated Bevel Purge
Publication number
20230113057
Publication date
Apr 13, 2023
Applied Materials, Inc.
Tejas Ulavi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Wafer Heater With Backside And Integrated Bevel Purge
Publication number
20210111059
Publication date
Apr 15, 2021
Applies Materials, Inc.
Tejas Ulavi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...