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Neal V. Lafferty
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Albany, NY, US
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last 30 patents
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Patent Grant
Three photomask sidewall image transfer method
Patent number
8,716,133
Issue date
May 6, 2014
International Business Machines Corporation
Shyng-Tsong Chen
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
THREE PHOTOMASK SIDEWALL IMAGE TRANSFER METHOD
Publication number
20140057436
Publication date
Feb 27, 2014
International Business Machines Corporation
Shyng-Tsong Chen
H01 - BASIC ELECTRIC ELEMENTS