Ned W. Teeny

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Chandler, AZ, US

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for sensing a wafer in a carrier
- Patent number 6,568,991
- Issue date May 27, 2003
- SpeedFam-IPEC Corporation
- John D. Herb
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus and process for cleaning a work piece
- Patent number 6,418,584
- Issue date Jul 16, 2002
- SpeedFam-IPEC Corporation
- Ned Teeny
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for sensing a wafer in a carrier
- Publication number 20030045205
- Publication date Mar 6, 2003
- John D. Herb
- B24 - GRINDING POLISHING