Neema Rastgar

Person

Pleasanton, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Metal contamination reduction in substrate processing systems with...
- Patent number 11,056,321
- Issue date Jul 6, 2021
- Lam Research Corporation
- Maolin Long
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Self limiting lateral atomic layer etch
- Patent number 10,714,354
- Issue date Jul 14, 2020
- Lam Research Corporation
- Tom Kamp
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Self limiting lateral atomic layer etch
- Patent number 9,620,376
- Issue date Apr 11, 2017
- Lam Research Corporation
- Tom Kamp
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Junction System for Direct-Drive Radiofrequency Power Supply
- Publication number 20240396372
- Publication date Nov 28, 2024
- LAM RESEARCH CORPORATION
- Alexander Miller Paterson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and Systems for Controlling Radiofrequency Pulse-Initiation...
- Publication number 20230154728
- Publication date May 18, 2023
- LAM RESEARCH CORPORATION
- Ying Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METAL CONTAMINATION REDUCTION IN SUBSTRATE PROCESSING SYSTEMS WITH...
- Publication number 20210327689
- Publication date Oct 21, 2021
- LAM RESEARCH CORPORATION
- Maolin Long
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METAL CONTAMINATION REDUCTION IN SUBSTRATE PROCESSING SYSTEMS WITH...
- Publication number 20200219708
- Publication date Jul 9, 2020
- LAM RESEARCH CORPORATION
- Maolin LONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELF LIMITING LATERAL ATOMIC LAYER ETCH
- Publication number 20170178917
- Publication date Jun 22, 2017
- LAM RESEARCH CORPORATION
- Tom Kamp
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELF LIMITING LATERAL ATOMIC LAYER ETCH
- Publication number 20170053808
- Publication date Feb 23, 2017
- LAM RESEARCH CORPORATION
- Tom Kamp
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON ETCH AND CLEAN
- Publication number 20160181111
- Publication date Jun 23, 2016
- LAM RESEARCH CORPORATION
- Tom A. Kamp
- H01 - BASIC ELECTRIC ELEMENTS

Neema Rastgar

Person

Patents Grantslast 30 patents

Metal contamination reduction in substrate processing systems with...

Self limiting lateral atomic layer etch

Self limiting lateral atomic layer etch

Patents Applicationslast 30 patents

Junction System for Direct-Drive Radiofrequency Power Supply

Methods and Systems for Controlling Radiofrequency Pulse-Initiation...

METAL CONTAMINATION REDUCTION IN SUBSTRATE PROCESSING SYSTEMS WITH...

METAL CONTAMINATION REDUCTION IN SUBSTRATE PROCESSING SYSTEMS WITH...

SELF LIMITING LATERAL ATOMIC LAYER ETCH

SELF LIMITING LATERAL ATOMIC LAYER ETCH

SILICON ETCH AND CLEAN