Neil Colvin

Person

Merrimack, NH, US

People

Patents Grantslast 30 patents

Information Patent Grant
Fluorine based molecular co-gas when running dimethylaluminum chlor...
- Patent number 12,051,561
- Issue date Jul 30, 2024
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for extending a lifetime of an ion source for mol...
- Patent number 11,756,772
- Issue date Sep 12, 2023
- Axcelis Technologies, Inc.
- David Sporleder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hydraulic feed system for an ion source
- Patent number 11,728,140
- Issue date Aug 15, 2023
- Axcelis Technologies, Inc.
- Neil J. Bassom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching aluminum nitride or aluminum oxide to generate an aluminum...
- Patent number 11,699,563
- Issue date Jul 11, 2023
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fluorine based molecular co-gas when running dimethylaluminum chlor...
- Patent number 11,699,565
- Issue date Jul 11, 2023
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source repeller
- Patent number 11,521,821
- Issue date Dec 6, 2022
- Axcelis Technologies, Inc.
- Steven T. Drummond
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hydrogen generator for an ion implanter
- Patent number 11,276,543
- Issue date Mar 15, 2022
- Axcelis Technologies, Inc.
- Neil K Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid metal ion source
- Patent number 11,170,967
- Issue date Nov 9, 2021
- Axcelis Technologies, Inc.
- Neil Bassom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hydrogen bleed gas for an ion source housing
- Patent number 11,062,873
- Issue date Jul 13, 2021
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hydrogen generator for an ion implanter
- Patent number 10,847,339
- Issue date Nov 24, 2020
- Axcelis Technologies, Inc.
- Neil K Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hydrogen co-gas when using aluminum iodide as an ion source material
- Patent number 10,676,370
- Issue date Jun 9, 2020
- Axcelis Technologies, Inc.
- Neil Colvin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low conductance self-shielding insulator for ion implantation systems
- Patent number 10,679,818
- Issue date Jun 9, 2020
- Axcelis Technologies, Inc.
- John F. Baggett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lanthanated tungsten ion source and beamline components
- Patent number 10,535,498
- Issue date Jan 14, 2020
- Axcelis Technologies, Inc.
- Neil K Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source repeller shield comprising a labyrinth seal
- Patent number 10,361,069
- Issue date Jul 23, 2019
- Axcelis Technologies, Inc.
- Neil K. Colvin
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Phosphine co-gas for carbon implants
- Patent number 10,361,081
- Issue date Jul 23, 2019
- Axcelis Technologies, Inc.
- Neil Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Phosphorous trifluoride co-gas for carbon implants
- Patent number 10,256,069
- Issue date Apr 9, 2019
- Axcelis Technologies, Inc.
- Neil Colvin
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
In-situ cleaning using hydrogen peroxide as co-gas to primary dopan...
- Patent number 10,170,286
- Issue date Jan 1, 2019
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Implantation using solid aluminum iodide (AlI3) for producing atomi...
- Patent number 10,087,520
- Issue date Oct 2, 2018
- Axcelis Technologies, Inc.
- Dennis Elliott Kamenitsa
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Low conductance self-shielding insulator for ion implantation systems
- Patent number 10,074,508
- Issue date Sep 11, 2018
- Axcelis Technologies, Inc.
- John F. Baggett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Implementation of co-gases for germanium and boron ion implants
- Patent number 9,984,855
- Issue date May 29, 2018
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source liner having a lip for ion implantation systems
- Patent number 9,978,555
- Issue date May 22, 2018
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source cathode shield
- Patent number 9,941,087
- Issue date Apr 10, 2018
- Axcells Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-piece electrode aperture
- Patent number 9,870,893
- Issue date Jan 16, 2018
- Axcelis Technologies, Inc.
- Neil K Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hydrogen COGas for carbon implant
- Patent number 9,805,912
- Issue date Oct 31, 2017
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reduced trace metals contamination ion source for an ion implantati...
- Patent number 9,543,110
- Issue date Jan 10, 2017
- Axcelis Technologies, Inc.
- Neil Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extraction electrode assembly voltage modulation in an ion implanta...
- Patent number 9,006,690
- Issue date Apr 14, 2015
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automatic control system for selection and optimization of co-gas f...
- Patent number 8,779,395
- Issue date Jul 15, 2014
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-vacuum beam defining aperture cleaning for particle reduction
- Patent number 8,604,418
- Issue date Dec 10, 2013
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adjustable louvered plasma electron flood enclosure
- Patent number 8,242,469
- Issue date Aug 14, 2012
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sensor for ion implanter
- Patent number 7,683,348
- Issue date Mar 23, 2010
- Axcelis Technologies, Inc.
- W Davis Lee
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
WIRE OR ROD SHAPED EXTRACTION ELECTRODE OPTICS
- Publication number 20240145213
- Publication date May 2, 2024
- Axcelis Technologies, Inc.
- Neil Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION SYSTEM AND METHOD FOR IMPLANTING ALUMINUM USING NO...
- Publication number 20240035148
- Publication date Feb 1, 2024
- Axcelis Technologies, Inc.
- Neil Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLUORINE BASED MOLECULAR CO-GAS WHEN RUNNING DIMETHYLALUMINUM CHLOR...
- Publication number 20230352265
- Publication date Nov 2, 2023
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYDRAULIC FEED SYSTEM FOR AN ION SOURCE
- Publication number 20230343558
- Publication date Oct 26, 2023
- Axcelis Technologies, Inc.
- Neil J. Bassom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYDRAULIC FEED SYSTEM FOR AN ION SOURCE
- Publication number 20230245859
- Publication date Aug 3, 2023
- Axcelis Technologies, Inc.
- Neil J. Bassom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHIELDED GAS INLET FOR AN ION SOURCE
- Publication number 20230135525
- Publication date May 4, 2023
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCE REPELLER
- Publication number 20220319796
- Publication date Oct 6, 2022
- Axcelis Technologies, Inc.
- Steven T. Drummond
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLUORINE BASED MOLECULAR CO-GAS WHEN RUNNING DIMETHYLALUMINUM CHLOR...
- Publication number 20220139664
- Publication date May 5, 2022
- Axcells Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING ALUMINUM NITRIDE OR ALUMINUM OXIDE TO GENERATE AN ALUMINUM...
- Publication number 20220139662
- Publication date May 5, 2022
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYDROGEN CO-GAS WHEN USING A CHLORINE-BASED ION SOURCE MATERIAL
- Publication number 20220013323
- Publication date Jan 13, 2022
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYDROGEN GENERATOR FOR AN ION IMPLANTER
- Publication number 20210090841
- Publication date Mar 25, 2021
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR EXTENDING A LIFETIME OF AN ION SOURCE FOR MOL...
- Publication number 20200388468
- Publication date Dec 10, 2020
- Axcelis Technologies, Inc.
- David Sporleder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID METAL ION SOURCE
- Publication number 20200303154
- Publication date Sep 24, 2020
- Axcelis Technologies, Inc.
- Neil Bassom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYDROGEN BLEED GAS FOR AN ION SOURCE HOUSING
- Publication number 20190348252
- Publication date Nov 14, 2019
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYDROGEN GENERATOR FOR AN ION IMPLANTER
- Publication number 20190228943
- Publication date Jul 25, 2019
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LANTHANATED TUNGSTEN ION SOURCE AND BEAMLINE COMPONETS
- Publication number 20180358202
- Publication date Dec 13, 2018
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Hydrogen CO-Gas When Using Aluminum Iodide as an Ion Source Material
- Publication number 20180346342
- Publication date Dec 6, 2018
- Axcelis Technologies, Inc.
- Neil Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOW CONDUCTANCE SELF-SHIELDING INSULATOR FOR ION IMPLANTATION SYSTEMS
- Publication number 20180350553
- Publication date Dec 6, 2018
- Axcells Technologies, Inc.
- John F. Baggett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOSPHINE CO-GAS FOR CARBON IMPLANTS
- Publication number 20180144940
- Publication date May 24, 2018
- Axcelis Technologies, Inc.
- Neil Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOSPHOROUS TRIFLUORIDE CO-GAS FOR CARBON IMPLANTS
- Publication number 20180144904
- Publication date May 24, 2018
- Axcelis Technologies, Inc.
- Neil Colvin
- C01 - INORGANIC CHEMISTRY
Information Patent Application
LOW CONDUCTANCE SELF-SHIELDING INSULATOR FOR ION IMPLANTATION SYSTEMS
- Publication number 20180138006
- Publication date May 17, 2018
- Axcelis Technologies, Inc.
- John Baggett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-SITU CLEANING USING HYDROGEN PEROXIDE AS CO-GAS TO PRIMARY DOPAN...
- Publication number 20180096828
- Publication date Apr 5, 2018
- Axcelis Technologies, Inc.
- Neil K. Colvin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IMPLANTATION USING SOLID ALUMINUM IODIDE (ALI3) FOR PRODUCING ATOMI...
- Publication number 20170362699
- Publication date Dec 21, 2017
- Axcelis Technologies, Inc.
- Dennis Elliott Kamenitsa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LANTHANATED TUNGSTEN ION SOURCE AND BEAMLINE COMPONENTS
- Publication number 20170330725
- Publication date Nov 16, 2017
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCE REPELLER SHIELD
- Publication number 20170287579
- Publication date Oct 5, 2017
- Axcelis Technologies, Inc.
- Neil K. Colvin
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
ION SOURCE CATHODE SHIELD
- Publication number 20170207054
- Publication date Jul 20, 2017
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-PIECE ELECTRODE APERTURE
- Publication number 20170207057
- Publication date Jul 20, 2017
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCE LINER HAVING A LIP FOR ION IMPLANTATION SYSTEMS
- Publication number 20170133193
- Publication date May 11, 2017
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION SOURCE WITH TEXTURED INTERIOR SURFACES
- Publication number 20150357151
- Publication date Dec 10, 2015
- Axcelis Technologies, Inc.
- Neil Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REDUCED TRACE METALS CONTAMINATION ION SOURCE FOR AN ION IMPLANTATI...
- Publication number 20150179393
- Publication date Jun 25, 2015
- Axcelis Technologies, Inc.
- Neil Colvin
- H01 - BASIC ELECTRIC ELEMENTS

Neil Colvin

Person

Patents Grantslast 30 patents

Fluorine based molecular co-gas when running dimethylaluminum chlor...

System and method for extending a lifetime of an ion source for mol...

Hydraulic feed system for an ion source

Etching aluminum nitride or aluminum oxide to generate an aluminum...

Fluorine based molecular co-gas when running dimethylaluminum chlor...

Ion source repeller

Hydrogen generator for an ion implanter

Liquid metal ion source

Hydrogen bleed gas for an ion source housing

Hydrogen generator for an ion implanter

Hydrogen co-gas when using aluminum iodide as an ion source material

Low conductance self-shielding insulator for ion implantation systems

Lanthanated tungsten ion source and beamline components

Ion source repeller shield comprising a labyrinth seal

Phosphine co-gas for carbon implants

Phosphorous trifluoride co-gas for carbon implants

In-situ cleaning using hydrogen peroxide as co-gas to primary dopan...

Implantation using solid aluminum iodide (AlI3) for producing atomi...

Low conductance self-shielding insulator for ion implantation systems

Implementation of co-gases for germanium and boron ion implants

Ion source liner having a lip for ion implantation systems

Ion source cathode shield

Multi-piece electrode aperture

Hydrogen COGas for carbon implant

Reduced trace metals contamination ion source for an ion implantati...

Extraction electrode assembly voltage modulation in an ion implanta...

Automatic control system for selection and optimization of co-gas f...

In-vacuum beam defining aperture cleaning for particle reduction

Adjustable louvered plasma electron flood enclosure

Sensor for ion implanter

Patents Applicationslast 30 patents

WIRE OR ROD SHAPED EXTRACTION ELECTRODE OPTICS

ION IMPLANTATION SYSTEM AND METHOD FOR IMPLANTING ALUMINUM USING NO...

FLUORINE BASED MOLECULAR CO-GAS WHEN RUNNING DIMETHYLALUMINUM CHLOR...

HYDRAULIC FEED SYSTEM FOR AN ION SOURCE

HYDRAULIC FEED SYSTEM FOR AN ION SOURCE

SHIELDED GAS INLET FOR AN ION SOURCE

ION SOURCE REPELLER

FLUORINE BASED MOLECULAR CO-GAS WHEN RUNNING DIMETHYLALUMINUM CHLOR...

ETCHING ALUMINUM NITRIDE OR ALUMINUM OXIDE TO GENERATE AN ALUMINUM...

HYDROGEN CO-GAS WHEN USING A CHLORINE-BASED ION SOURCE MATERIAL

HYDROGEN GENERATOR FOR AN ION IMPLANTER

SYSTEM AND METHOD FOR EXTENDING A LIFETIME OF AN ION SOURCE FOR MOL...

LIQUID METAL ION SOURCE

HYDROGEN BLEED GAS FOR AN ION SOURCE HOUSING

HYDROGEN GENERATOR FOR AN ION IMPLANTER

LANTHANATED TUNGSTEN ION SOURCE AND BEAMLINE COMPONETS

Hydrogen CO-Gas When Using Aluminum Iodide as an Ion Source Material

LOW CONDUCTANCE SELF-SHIELDING INSULATOR FOR ION IMPLANTATION SYSTEMS

PHOSPHINE CO-GAS FOR CARBON IMPLANTS

PHOSPHOROUS TRIFLUORIDE CO-GAS FOR CARBON IMPLANTS

LOW CONDUCTANCE SELF-SHIELDING INSULATOR FOR ION IMPLANTATION SYSTEMS

IN-SITU CLEANING USING HYDROGEN PEROXIDE AS CO-GAS TO PRIMARY DOPAN...

IMPLANTATION USING SOLID ALUMINUM IODIDE (ALI3) FOR PRODUCING ATOMI...

LANTHANATED TUNGSTEN ION SOURCE AND BEAMLINE COMPONENTS

ION SOURCE REPELLER SHIELD

ION SOURCE CATHODE SHIELD

MULTI-PIECE ELECTRODE APERTURE

ION SOURCE LINER HAVING A LIP FOR ION IMPLANTATION SYSTEMS

ION IMPLANTATION SOURCE WITH TEXTURED INTERIOR SURFACES

REDUCED TRACE METALS CONTAMINATION ION SOURCE FOR AN ION IMPLANTATI...