Neil G. W. Hedtke

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Minnetonka, MN, US

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Patents Grantslast 30 patents

Information Patent Grant
Methods and systems for reducing stick-down within MEMS structures
- Patent number 6,718,825
- Issue date Apr 13, 2004
- Honeywell International Inc.
- William P. Platt
- B81 - MICRO-STRUCTURAL TECHNOLOGY