Neil J. Bassom

Person

Hamilton, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Dual source injector with switchable analyzing magnet
- Patent number 11,823,858
- Issue date Nov 21, 2023
- Axcelis Technologies, Inc.
- Wilhelm Platow
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Extended lifetime dual indirectly-heated cathode ion source
- Patent number 11,798,775
- Issue date Oct 24, 2023
- Axcelis Technologies, Inc.
- Wilhelm Platow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for extending a lifetime of an ion source for mol...
- Patent number 11,756,772
- Issue date Sep 12, 2023
- Axcelis Technologies, Inc.
- David Sporleder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hydraulic feed system for an ion source
- Patent number 11,728,140
- Issue date Aug 15, 2023
- Axcelis Technologies, Inc.
- Neil J. Bassom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching aluminum nitride or aluminum oxide to generate an aluminum...
- Patent number 11,699,563
- Issue date Jul 11, 2023
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fluorine based molecular co-gas when running dimethylaluminum chlor...
- Patent number 11,699,565
- Issue date Jul 11, 2023
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source with multiple bias electrodes
- Patent number 11,545,330
- Issue date Jan 3, 2023
- Axcelis Technologies, Inc.
- Wilhelm Platow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stepped indirectly heated cathode with improved shielding
- Patent number 11,244,800
- Issue date Feb 8, 2022
- Axcelis Technologies, Inc.
- Wilhelm Platow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple arc chamber source
- Patent number 11,183,365
- Issue date Nov 23, 2021
- Axcelis Technologies, Inc.
- Joshua Max Abeshaus
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid metal ion source
- Patent number 11,170,967
- Issue date Nov 9, 2021
- Axcelis Technologies, Inc.
- Neil Bassom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for aligning light-transmitting birefringent work...
- Patent number 10,720,354
- Issue date Jul 21, 2020
- Axcelis Technologies, Inc.
- Neil James Bassom
- G01 - MEASURING TESTING
Information Patent Grant
Tetrode extraction apparatus for ion source
- Patent number 10,573,485
- Issue date Feb 25, 2020
- Axcelis Technologies, Inc.
- Wilhelm Platow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dynamic temperature control of an ion source
- Patent number 10,347,457
- Issue date Jul 9, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Alexander S. Perel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating insulating materials for improved life
- Patent number 10,221,476
- Issue date Mar 5, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Craig R. Chaney
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ceramic ion source chamber
- Patent number 9,887,060
- Issue date Feb 6, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Craig R. Chaney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for generating high current negative hydrogen...
- Patent number 9,773,636
- Issue date Sep 26, 2017
- Varian Semiconductor Equipment Associates, Inc.
- W. Davis Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceramic ion source chamber
- Patent number 9,741,522
- Issue date Aug 22, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Craig R. Chaney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for improving the performance and extending the lifetime...
- Patent number 9,530,615
- Issue date Dec 27, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Peter F. Kurunczi
- B08 - CLEANING
Information Patent Grant
Gallium ION source and materials therefore
- Patent number 9,396,902
- Issue date Jul 19, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for dynamic temperature control of an ion source
- Patent number 9,287,079
- Issue date Mar 15, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Craig R. Chaney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas coupled arc chamber cooling
- Patent number 9,275,820
- Issue date Mar 1, 2016
- Varian Semiconductor Equipment Associates, Inc.
- William Davis Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extended lifetime ion source
- Patent number 9,187,832
- Issue date Nov 17, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Costel Biloiu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Self-cleaning radio frequency plasma source
- Patent number 9,142,392
- Issue date Sep 22, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Neil J. Bassom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for thermal control of ion sources and sputter...
- Patent number 9,134,074
- Issue date Sep 15, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Neil J. Bassom
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Excited gas injection for ion implant control
- Patent number 9,018,829
- Issue date Apr 28, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Technique for ion implanting a target
- Patent number 8,937,003
- Issue date Jan 20, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Alexander S. Perel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion source
- Patent number 8,759,788
- Issue date Jun 24, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Neil Bassom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Excited gas injection for ion implant control
- Patent number 8,501,624
- Issue date Aug 6, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning of an extraction aperture of an ion source
- Patent number 8,455,839
- Issue date Jun 4, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Craig R. Chaney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Flexible ion source
- Patent number 8,330,127
- Issue date Dec 11, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Russell J. Low
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DUAL SOURCE INJECTOR WITH SWITCHABLE ANALYZING MAGNET
- Publication number 20240029998
- Publication date Jan 25, 2024
- Axcelis Technologies, Inc.
- Wilhelm Platow
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
FLUORINE BASED MOLECULAR CO-GAS WHEN RUNNING DIMETHYLALUMINUM CHLOR...
- Publication number 20230352265
- Publication date Nov 2, 2023
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYDRAULIC FEED SYSTEM FOR AN ION SOURCE
- Publication number 20230343558
- Publication date Oct 26, 2023
- Axcelis Technologies, Inc.
- Neil J. Bassom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUAL SOURCE INJECTOR WITH SWITCHABLE ANALYZING MAGNET
- Publication number 20230307210
- Publication date Sep 28, 2023
- Axcelis Technologies, Inc.
- Wilhelm Platow
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
HYDRAULIC FEED SYSTEM FOR AN ION SOURCE
- Publication number 20230245859
- Publication date Aug 3, 2023
- Axcelis Technologies, Inc.
- Neil J. Bassom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH INCIDENCE ANGLE GRAPHITE FOR PARTICLE CONTROL WITH DEDICATED L...
- Publication number 20230235449
- Publication date Jul 27, 2023
- Axcelis Technologies, Inc.
- David M. Burtner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHARGE FILTER MAGNET WITH VARIABLE ACHROMATICITY
- Publication number 20230139138
- Publication date May 4, 2023
- Axcelis Technologies, Inc.
- Wilhelm Platow
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SHIELDED GAS INLET FOR AN ION SOURCE
- Publication number 20230135525
- Publication date May 4, 2023
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTENDED LIFETIME DUAL INDIRECTLY-HEATED CATHODE ION SOURCE
- Publication number 20230100805
- Publication date Mar 30, 2023
- Axcelis Technologies, Inc.
- Wilhelm Platow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCE WITH MULTIPLE BIAS ELECTRODES
- Publication number 20220367138
- Publication date Nov 17, 2022
- Axcelis Technologies, Inc.
- Wilhelm Platow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLUORINE BASED MOLECULAR CO-GAS WHEN RUNNING DIMETHYLALUMINUM CHLOR...
- Publication number 20220139664
- Publication date May 5, 2022
- Axcells Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING ALUMINUM NITRIDE OR ALUMINUM OXIDE TO GENERATE AN ALUMINUM...
- Publication number 20220139662
- Publication date May 5, 2022
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYDROGEN CO-GAS WHEN USING A CHLORINE-BASED ION SOURCE MATERIAL
- Publication number 20220013323
- Publication date Jan 13, 2022
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STEPPED INDIRECTLY HEATED CATHODE WITH IMPROVED SHIELDING
- Publication number 20210398765
- Publication date Dec 23, 2021
- Axcelis Technologies, Inc.
- Wilhelm Platow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR EXTENDING A LIFETIME OF AN ION SOURCE FOR MOL...
- Publication number 20200388468
- Publication date Dec 10, 2020
- Axcelis Technologies, Inc.
- David Sporleder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE ARC CHAMBER SOURCE
- Publication number 20200335302
- Publication date Oct 22, 2020
- Axcelis Technologies, Inc.
- Joshua Max Abeshaus
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID METAL ION SOURCE
- Publication number 20200303154
- Publication date Sep 24, 2020
- Axcelis Technologies, Inc.
- Neil Bassom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR ALIGNING LIGHT-TRANSMITTING BIREFRINGENT WORK...
- Publication number 20200075379
- Publication date Mar 5, 2020
- Axcelis Technologies, Inc.
- Neil James Bassom
- G02 - OPTICS
Information Patent Application
Dynamic Temperature Control Of An Ion Source
- Publication number 20190189387
- Publication date Jun 20, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Alexander S. Perel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ceramic Ion Source Chamber
- Publication number 20170309434
- Publication date Oct 26, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Craig R. Chaney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ceramic Ion Source Chamber
- Publication number 20170221669
- Publication date Aug 3, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Craig R. Chaney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR GENERATING HIGH CURRENT NEGATIVE HYDROGEN...
- Publication number 20170053776
- Publication date Feb 23, 2017
- Varian Semiconductor Equipment Associates, Inc.
- W. Davis Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus For Dynamic Temperature Control Of An Ion Source
- Publication number 20160005564
- Publication date Jan 7, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Craig R. Chaney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Gas Coupled Arc Chamber Cooling
- Publication number 20150061490
- Publication date Mar 5, 2015
- Varian Semiconductor Equipment Associates, Inc.
- William Davis Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coating Insulating Materials For Improved Life
- Publication number 20140352617
- Publication date Dec 4, 2014
- Craig R. Chaney
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EXTENDED LIFETIME ION SOURCE
- Publication number 20140326594
- Publication date Nov 6, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Costel Biloiu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELF-CLEANING RADIO FREQUENCY PLASMA SOURCE
- Publication number 20140320012
- Publication date Oct 30, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Neil J. Bassom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR THERMAL CONTROL OF ION SOURCES AND SPUTTER...
- Publication number 20140099782
- Publication date Apr 10, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Neil J. Bassom
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
Techniques For Improving The Performance And Extending The Lifetime...
- Publication number 20140041684
- Publication date Feb 13, 2014
- Peter F. Kurunczi
- B08 - CLEANING
Information Patent Application
METHODS FOR EXTENDING ION SOURCE LIFE AND IMPROVING ION SOURCE PERF...
- Publication number 20130341761
- Publication date Dec 26, 2013
- Ashwini K. SINHA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Neil J. Bassom

Person

Patents Grantslast 30 patents

Dual source injector with switchable analyzing magnet

Extended lifetime dual indirectly-heated cathode ion source

System and method for extending a lifetime of an ion source for mol...

Hydraulic feed system for an ion source

Etching aluminum nitride or aluminum oxide to generate an aluminum...

Fluorine based molecular co-gas when running dimethylaluminum chlor...

Ion source with multiple bias electrodes

Stepped indirectly heated cathode with improved shielding

Multiple arc chamber source

Liquid metal ion source

System and method for aligning light-transmitting birefringent work...

Tetrode extraction apparatus for ion source

Dynamic temperature control of an ion source

Coating insulating materials for improved life

Ceramic ion source chamber

Apparatus and method for generating high current negative hydrogen...

Ceramic ion source chamber

Techniques for improving the performance and extending the lifetime...

Gallium ION source and materials therefore

Apparatus for dynamic temperature control of an ion source

Gas coupled arc chamber cooling

Extended lifetime ion source

Self-cleaning radio frequency plasma source

Method and apparatus for thermal control of ion sources and sputter...

Excited gas injection for ion implant control

Technique for ion implanting a target

Ion source

Excited gas injection for ion implant control

Cleaning of an extraction aperture of an ion source

Flexible ion source

Patents Applicationslast 30 patents

DUAL SOURCE INJECTOR WITH SWITCHABLE ANALYZING MAGNET

FLUORINE BASED MOLECULAR CO-GAS WHEN RUNNING DIMETHYLALUMINUM CHLOR...

HYDRAULIC FEED SYSTEM FOR AN ION SOURCE

DUAL SOURCE INJECTOR WITH SWITCHABLE ANALYZING MAGNET

HYDRAULIC FEED SYSTEM FOR AN ION SOURCE

HIGH INCIDENCE ANGLE GRAPHITE FOR PARTICLE CONTROL WITH DEDICATED L...

CHARGE FILTER MAGNET WITH VARIABLE ACHROMATICITY

SHIELDED GAS INLET FOR AN ION SOURCE

EXTENDED LIFETIME DUAL INDIRECTLY-HEATED CATHODE ION SOURCE

ION SOURCE WITH MULTIPLE BIAS ELECTRODES

FLUORINE BASED MOLECULAR CO-GAS WHEN RUNNING DIMETHYLALUMINUM CHLOR...

ETCHING ALUMINUM NITRIDE OR ALUMINUM OXIDE TO GENERATE AN ALUMINUM...

HYDROGEN CO-GAS WHEN USING A CHLORINE-BASED ION SOURCE MATERIAL

STEPPED INDIRECTLY HEATED CATHODE WITH IMPROVED SHIELDING

SYSTEM AND METHOD FOR EXTENDING A LIFETIME OF AN ION SOURCE FOR MOL...

MULTIPLE ARC CHAMBER SOURCE

LIQUID METAL ION SOURCE

SYSTEM AND METHOD FOR ALIGNING LIGHT-TRANSMITTING BIREFRINGENT WORK...

Dynamic Temperature Control Of An Ion Source

Ceramic Ion Source Chamber

Ceramic Ion Source Chamber

APPARATUS AND METHOD FOR GENERATING HIGH CURRENT NEGATIVE HYDROGEN...

Apparatus For Dynamic Temperature Control Of An Ion Source

Gas Coupled Arc Chamber Cooling

Coating Insulating Materials For Improved Life

EXTENDED LIFETIME ION SOURCE

SELF-CLEANING RADIO FREQUENCY PLASMA SOURCE

METHOD AND APPARATUS FOR THERMAL CONTROL OF ION SOURCES AND SPUTTER...

Techniques For Improving The Performance And Extending The Lifetime...

METHODS FOR EXTENDING ION SOURCE LIFE AND IMPROVING ION SOURCE PERF...