Neil Martin Paul Benjamin

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East Palo Alto, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Methods and arrangements for in-situ process monitoring and control...
- Patent number 8,271,121
- Issue date Sep 18, 2012
- Lam Research Corporation
- Vijayakumar C. Venugopal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for chuck thermal calibration
- Patent number 7,802,917
- Issue date Sep 28, 2010
- Lam Research Corporation
- Keith William Gaff
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SYNCHRONIZED AND SHORTENED MASTER-SLAVE RF PULSING IN A PLASMA PROC...
- Publication number 20130009545
- Publication date Jan 10, 2013
- Neil Martin Paul Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND ARRANGEMENTS FOR IN-SITU PROCESS MONITORING AND CONTROL...
- Publication number 20100332011
- Publication date Dec 30, 2010
- Vijayakumar C. Venugopal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for Chuck Thermal Calibration
- Publication number 20100309604
- Publication date Dec 9, 2010
- LAM RESEARCH CORPORATION
- Keith William Gaff
- H01 - BASIC ELECTRIC ELEMENTS