Nell Benjamin

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East Palo Alto, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Multiplexed heater array using AC drive for semiconductor processing
- Patent number 9,324,589
- Issue date Apr 26, 2016
- Lam Research Corporation
- John Pease
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MULTIPLEXED HEATER ARRAY USING AC DRIVE FOR SEMICONDUCTOR PROCESSING
- Publication number 20130220989
- Publication date Aug 29, 2013
- Lam Research Corporation
- John Pease
- H01 - BASIC ELECTRIC ELEMENTS