Neo-Feng Chiou

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Shinshe Shiang, TW

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck assembly having disassembling device
- Patent number 7,102,871
- Issue date Sep 5, 2006
- Taiwan Semiconductor Manufacturing Co,, Ltd.
- Cheng-Liang Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Electrostatic chuck assembly having disassembling device
- Publication number 20050094349
- Publication date May 5, 2005
- Cheng-Liang Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...