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Neungho Shin
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San Ramon, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Arrangements for manipulating plasma confinement within a plasma pr...
Patent number
10,217,610
Issue date
Feb 26, 2019
Lam Research Corporation
Eller Y. Juco
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Arrangements for manipulating plasma confinement within a plasma pr...
Patent number
9,275,838
Issue date
Mar 1, 2016
Lam Research Corporation
Eller Y. Juco
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for depositing bevel protective film
Patent number
8,501,283
Issue date
Aug 6, 2013
Lam Research Corporation
Neungho Shin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Arrangements and methods for improving bevel etch repeatability amo...
Patent number
7,977,123
Issue date
Jul 12, 2011
Lam Research Corporation
Andreas Fischer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming a low-K dual damascene interconnect structure
Patent number
7,435,685
Issue date
Oct 14, 2008
Applied Materials, Inc.
Gerardo A. Delgadino
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Selective etching of carbon-doped low-k dielectrics
Patent number
7,256,134
Issue date
Aug 14, 2007
Applied Materials, Inc.
Yunsang Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming a low-K dual damascene interconnect structure
Patent number
7,132,369
Issue date
Nov 7, 2006
Applied Materials, Inc.
Gerardo A. Delgadino
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Arrangements for Manipulating Plasma Confinement Within a Plasma Pr...
Publication number
20160126070
Publication date
May 5, 2016
LAM RESEARCH CORPORATION
Eller Y. Juco
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ARRANGEMENT FOR DEPOSITING BEVEL PROTECTIVE FILM
Publication number
20130312913
Publication date
Nov 28, 2013
Neungho Shin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR DEPOSITING BEVEL PROTECTIVE FILM
Publication number
20120094502
Publication date
Apr 19, 2012
Neungho Shin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ARRANGEMENTS FOR IMPROVING BEVEL ETCH REPEATABILITY AMONG SUBSTRATES
Publication number
20110259520
Publication date
Oct 27, 2011
Andreas Fischer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ARRANGEMENTS FOR MANIPULATING PLASMA CONFINEMENT WITHIN A PLASMA PR...
Publication number
20110049101
Publication date
Mar 3, 2011
Eller Y. Juco
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ARRANGEMENTS AND METHODS FOR IMPROVING BEVEL ETCH REPEATABILITY AMO...
Publication number
20100297788
Publication date
Nov 25, 2010
Andreas Fischer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FORMING A LOW-K DUAL DAMASCENE INTERCONNECT STRUCTURE
Publication number
20080145998
Publication date
Jun 19, 2008
Applied Materials, Inc.
GERARDO A. DELGADINO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Selective etching of carbon-doped low-k dielectrics
Publication number
20050026430
Publication date
Feb 3, 2005
APPLIED MATERIALS, INC.
Yunsang Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of forming a low-K dual damascene interconnect structure
Publication number
20040157453
Publication date
Aug 12, 2004
APPLIED MATERIALS, INC.
Gerardo A. Delgadino
H01 - BASIC ELECTRIC ELEMENTS