Ni-Hwi Kuan

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Hsinchu City, TW

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Patents Grantslast 30 patents

Information Patent Grant
Method to avoid amorphous-si damage during wet stripping processes...
- Patent number 7,384,799
- Issue date Jun 10, 2008
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Fei-Yun Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Method to avoid alpha-Si damage during wet stripping processes in t...
- Publication number 20060166509
- Publication date Jul 27, 2006
- Fei-Yun Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY