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last 30 patents
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Patent Grant
Br2SbCH3 a solid source ion implant and CVD precursor
Patent number
6,767,830
Issue date
Jul 27, 2004
Advanced Technology Materials, Inc.
Ziyun Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Br2SbCH3 a solid source ion implant and CVD precursor
Publication number
20040029367
Publication date
Feb 12, 2004
Ziyun Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...