Nian-Fuh Cheng

Person

  • Hsinchu City, TW

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    METHODS FOR GENERATING A MANDREL MASK

    • Publication number 20190064652
    • Publication date Feb 28, 2019
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Tsung-Yu Wang
    • G06 - COMPUTING CALCULATING COUNTING
  • Information Patent Application

    Mandrel Spacer Patterning in Multi-Pitch Integrated Circuit Manufac...

    • Publication number 20170316938
    • Publication date Nov 2, 2017
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Chia-Ping Chiang
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Enhanced EUV Lithography System

    • Publication number 20160327854
    • Publication date Nov 10, 2016
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Ching-Hsu Chang
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    ENHANCED EUV LITHOGRAPHY SYSTEM

    • Publication number 20150331333
    • Publication date Nov 19, 2015
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Ching-Hsu Chang
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    METHOD OF PATTERNING FEATURES OF A SEMICONDUCTOR DEVICE

    • Publication number 20150228542
    • Publication date Aug 13, 2015
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Wei-Chao Chiu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD OF PATTERNING FEATURES OF A SEMICONDUCTOR DEVICE

    • Publication number 20140273363
    • Publication date Sep 18, 2014
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Wei-Chao Chiu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Smart Subfield Method For E-Beam Lithographny

    • Publication number 20140099582
    • Publication date Apr 10, 2014
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Pei-Shiang Chen
    • G06 - COMPUTING CALCULATING COUNTING
  • Information Patent Application

    FRACTURE AWARE OPC

    • Publication number 20140013287
    • Publication date Jan 9, 2014
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Nian-Fuh Cheng
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    SMART SUBFIELD METHOD FOR E-BEAM LITHOGRAPHY

    • Publication number 20130323648
    • Publication date Dec 5, 2013
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Pei-Shiang Chen
    • G06 - COMPUTING CALCULATING COUNTING
  • Information Patent Application

    ENHANCED EUV LITHOGRAPHY SYSTEM

    • Publication number 20130258304
    • Publication date Oct 3, 2013
    • TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
    • Ching-Hsu Chang
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    STRIPING METHODOLOGY FOR MASKLESS LITHOGRAPHY

    • Publication number 20130061187
    • Publication date Mar 7, 2013
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Hung-Chun Wang
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    GEOMETRIC PATTERN DATA QUALITY VERIFICATION FOR MASKLESS LITHOGRAPHY

    • Publication number 20130055173
    • Publication date Feb 28, 2013
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Hung-Chun Wang
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY