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Nian-Fuh Cheng
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Hsinchu City, TW
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Patents Grants
last 30 patents
Information
Patent Grant
Methods for generating a mandrel mask
Patent number
10,324,369
Issue date
Jun 18, 2019
Taiwan Semiconductor Manufacturing Co., Ltd
Tsung-Yu Wang
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Mandrel spacer patterning in multi-pitch integrated circuit manufac...
Patent number
9,911,606
Issue date
Mar 6, 2018
Taiwan Semiconductor Manufacturing Co., Ltd.
Chia-Ping Chiang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Enhanced EUV lithography system
Patent number
9,880,460
Issue date
Jan 30, 2018
Taiwan Semiconductor Manufacturing Company, Ltd.
Ching-Hsu Chang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of patterning features of a semiconductor device
Patent number
9,627,262
Issue date
Apr 18, 2017
Taiwan Semiconductor Manufacturing Company, Ltd.
Wei-Chao Chiu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Enhanced EUV lithography system
Patent number
9,395,618
Issue date
Jul 19, 2016
Taiwan Semiconductor Manufacturing Company, Ltd.
Ching-Hsu Chang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Enhanced EUV lithography system
Patent number
9,091,930
Issue date
Jul 28, 2015
Taiwan Semiconductor Manufacturing Company, Ltd.
Ching-Hsu Chang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of patterning features of a semiconductor device
Patent number
9,023,695
Issue date
May 5, 2015
Taiwan Semiconductor Manufacturing Company, Ltd.
Wei-Chao Chiu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Smart subfield method for E-beam lithography
Patent number
8,945,803
Issue date
Feb 3, 2015
Taiwan Semiconductor Manufacturing Company, Ltd.
Pei-Shiang Chen
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Fracture aware OPC
Patent number
8,745,550
Issue date
Jun 3, 2014
Taiwan Semiconductor Manufacturing Company, Ltd.
Nian-Fuh Cheng
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Smart subfield method for E-beam lithography
Patent number
8,609,308
Issue date
Dec 17, 2013
Taiwan Semicondcutor Manufacturing Company, Ltd.
Pei-Shiang Chen
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Geometric pattern data quality verification for maskless lithography
Patent number
8,601,407
Issue date
Dec 3, 2013
Taiwan Semiconductor Manufacturing Company, Ltd.
Hung-Chun Wang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Striping methodology for maskless lithography
Patent number
8,473,877
Issue date
Jun 25, 2013
Taiwan Semiconductor Manufacturing Company, Ltd.
Hung-Chun Wang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for high volume e-beam lithography
Patent number
8,468,473
Issue date
Jun 18, 2013
Taiwan Semiconductor Manufacturing Company, Ltd.
Hung-Chun Wang
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
METHODS FOR GENERATING A MANDREL MASK
Publication number
20190064652
Publication date
Feb 28, 2019
Taiwan Semiconductor Manufacturing Co., Ltd.
Tsung-Yu Wang
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Mandrel Spacer Patterning in Multi-Pitch Integrated Circuit Manufac...
Publication number
20170316938
Publication date
Nov 2, 2017
Taiwan Semiconductor Manufacturing Co., LTD
Chia-Ping Chiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Enhanced EUV Lithography System
Publication number
20160327854
Publication date
Nov 10, 2016
Taiwan Semiconductor Manufacturing Company, Ltd.
Ching-Hsu Chang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ENHANCED EUV LITHOGRAPHY SYSTEM
Publication number
20150331333
Publication date
Nov 19, 2015
Taiwan Semiconductor Manufacturing Company, Ltd.
Ching-Hsu Chang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF PATTERNING FEATURES OF A SEMICONDUCTOR DEVICE
Publication number
20150228542
Publication date
Aug 13, 2015
Taiwan Semiconductor Manufacturing Company, Ltd.
Wei-Chao Chiu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PATTERNING FEATURES OF A SEMICONDUCTOR DEVICE
Publication number
20140273363
Publication date
Sep 18, 2014
Taiwan Semiconductor Manufacturing Company, Ltd.
Wei-Chao Chiu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Smart Subfield Method For E-Beam Lithographny
Publication number
20140099582
Publication date
Apr 10, 2014
Taiwan Semiconductor Manufacturing Company, Ltd.
Pei-Shiang Chen
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
FRACTURE AWARE OPC
Publication number
20140013287
Publication date
Jan 9, 2014
Taiwan Semiconductor Manufacturing Company, Ltd.
Nian-Fuh Cheng
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SMART SUBFIELD METHOD FOR E-BEAM LITHOGRAPHY
Publication number
20130323648
Publication date
Dec 5, 2013
Taiwan Semiconductor Manufacturing Company, Ltd.
Pei-Shiang Chen
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
ENHANCED EUV LITHOGRAPHY SYSTEM
Publication number
20130258304
Publication date
Oct 3, 2013
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
Ching-Hsu Chang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
STRIPING METHODOLOGY FOR MASKLESS LITHOGRAPHY
Publication number
20130061187
Publication date
Mar 7, 2013
Taiwan Semiconductor Manufacturing Company, Ltd.
Hung-Chun Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GEOMETRIC PATTERN DATA QUALITY VERIFICATION FOR MASKLESS LITHOGRAPHY
Publication number
20130055173
Publication date
Feb 28, 2013
Taiwan Semiconductor Manufacturing Company, Ltd.
Hung-Chun Wang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY