Nicholaas A.A.J. Van Asten

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Breda, NL

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Patents Grantslast 30 patents

Information Patent Grant
Off-axis levelling in lithographic projection apparatus
- Patent number 7,202,938
- Issue date Apr 10, 2007
- ASML Netherlands B.V.
- Theodorus M. Modderman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Off-axis levelling in lithographic projection apparatus
- Publication number 20050157281
- Publication date Jul 21, 2005
- ASML NETHERLANDS B.V.
- Johannes C.M. Jasper
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY